7/19/2012	7:23:54 AM	Main Vac valve closed
7/19/2012	7:24:07 AM	Main Vac valve opened
7/19/2012	7:24:36 AM	Recipe started at 7:24 AM
7/19/2012	7:24:36 AM	Helium valve closed
7/19/2012	7:24:36 AM	H2 valve closed
7/19/2012	7:24:36 AM	BCl3 valve closed
7/19/2012	7:24:36 AM	PH3 valve closed
7/19/2012	7:24:36 AM	SiCl4 pre valve closed
7/19/2012	7:24:36 AM	SiCl4 post valve closed
7/19/2012	7:24:36 AM	Main Vac valve closed
7/19/2012	7:24:36 AM	Bypass valve closed
7/19/2012	7:24:36 AM	Bubbler valve closed
7/19/2012	7:24:36 AM	Helium MFC set to  0.000000
7/19/2012	7:24:36 AM	H2 MFC set to  0.000000
7/19/2012	7:24:36 AM	BCl3 MFC set to  0.000000
7/19/2012	7:24:36 AM	PH3 MFC set to  0.000000
7/19/2012	7:24:36 AM	SiCl4 MFC set to  0.000000
7/19/2012	7:24:36 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:24:36 AM	Tube furnace set to 0
7/19/2012	7:24:39 AM	Helium valve closed
7/19/2012	7:24:39 AM	BCl3 valve closed
7/19/2012	7:24:39 AM	PH3 valve closed
7/19/2012	7:24:39 AM	SiCl4 pre valve closed
7/19/2012	7:24:39 AM	SiCl4 post valve closed
7/19/2012	7:24:39 AM	Main Vac valve closed
7/19/2012	7:24:39 AM	Bypass valve closed
7/19/2012	7:24:39 AM	Bubbler valve closed
7/19/2012	7:24:39 AM	H2 valve opened
7/19/2012	7:24:39 AM	Helium MFC set to  0.000000
7/19/2012	7:24:39 AM	H2 MFC set to  500.000000
7/19/2012	7:24:39 AM	BCl3 MFC set to  0.000000
7/19/2012	7:24:39 AM	PH3 MFC set to  0.000000
7/19/2012	7:24:39 AM	SiCl4 MFC set to  0.000000
7/19/2012	7:24:39 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:24:39 AM	Tube furnace set to 50
7/19/2012	7:25:56 AM	Helium valve closed
7/19/2012	7:25:56 AM	BCl3 valve closed
7/19/2012	7:25:56 AM	PH3 valve closed
7/19/2012	7:25:56 AM	SiCl4 pre valve closed
7/19/2012	7:25:56 AM	SiCl4 post valve closed
7/19/2012	7:25:56 AM	Main Vac valve closed
7/19/2012	7:25:56 AM	Bypass valve closed
7/19/2012	7:25:56 AM	H2 valve opened
7/19/2012	7:25:56 AM	Bubbler valve opened
7/19/2012	7:25:56 AM	Helium MFC set to  0.000000
7/19/2012	7:25:56 AM	H2 MFC set to  500.000000
7/19/2012	7:25:56 AM	BCl3 MFC set to  0.000000
7/19/2012	7:25:56 AM	PH3 MFC set to  0.000000
7/19/2012	7:25:56 AM	SiCl4 MFC set to  0.000000
7/19/2012	7:25:56 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:25:56 AM	Tube furnace set to 50
7/19/2012	7:25:57 AM	Helium valve closed
7/19/2012	7:25:57 AM	BCl3 valve closed
7/19/2012	7:25:57 AM	PH3 valve closed
7/19/2012	7:25:57 AM	SiCl4 pre valve closed
7/19/2012	7:25:57 AM	SiCl4 post valve closed
7/19/2012	7:25:57 AM	Main Vac valve closed
7/19/2012	7:25:57 AM	Bypass valve closed
7/19/2012	7:25:57 AM	H2 valve opened
7/19/2012	7:25:57 AM	Bubbler valve opened
7/19/2012	7:25:57 AM	Helium MFC set to  0.000000
7/19/2012	7:25:57 AM	H2 MFC set to  500.000000
7/19/2012	7:25:57 AM	BCl3 MFC set to  0.000000
7/19/2012	7:25:57 AM	PH3 MFC set to  0.000000
7/19/2012	7:25:57 AM	SiCl4 MFC set to  0.000000
7/19/2012	7:25:57 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:25:57 AM	Tube furnace set to 1000
7/19/2012	7:45:57 AM	Helium valve closed
7/19/2012	7:45:57 AM	BCl3 valve closed
7/19/2012	7:45:57 AM	PH3 valve closed
7/19/2012	7:45:57 AM	Main Vac valve closed
7/19/2012	7:45:57 AM	Bypass valve closed
7/19/2012	7:45:57 AM	H2 valve opened
7/19/2012	7:45:57 AM	SiCl4 pre valve opened
7/19/2012	7:45:57 AM	SiCl4 post valve opened
7/19/2012	7:45:57 AM	Bubbler valve opened
7/19/2012	7:45:57 AM	Helium MFC set to  0.000000
7/19/2012	7:45:57 AM	H2 MFC set to  500.000000
7/19/2012	7:45:57 AM	BCl3 MFC set to  0.000000
7/19/2012	7:45:57 AM	PH3 MFC set to  0.000000
7/19/2012	7:45:57 AM	SiCl4 MFC set to  50.000000
7/19/2012	7:45:57 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:45:57 AM	Tube furnace set to 1000
7/19/2012	7:55:27 AM	Helium valve closed
7/19/2012	7:55:27 AM	BCl3 valve closed
7/19/2012	7:55:27 AM	PH3 valve closed
7/19/2012	7:55:27 AM	SiCl4 pre valve closed
7/19/2012	7:55:27 AM	SiCl4 post valve closed
7/19/2012	7:55:27 AM	Main Vac valve closed
7/19/2012	7:55:27 AM	Bypass valve closed
7/19/2012	7:55:27 AM	H2 valve opened
7/19/2012	7:55:27 AM	Bubbler valve opened
7/19/2012	7:55:27 AM	Helium MFC set to  0.000000
7/19/2012	7:55:27 AM	H2 MFC set to  500.000000
7/19/2012	7:55:27 AM	BCl3 MFC set to  0.000000
7/19/2012	7:55:27 AM	PH3 MFC set to  0.000000
7/19/2012	7:55:27 AM	SiCl4 MFC set to  0.000000
7/19/2012	7:55:27 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:55:28 AM	Tube furnace set to 750
7/19/2012	8:05:28 AM	H2 valve closed
7/19/2012	8:05:28 AM	BCl3 valve closed
7/19/2012	8:05:28 AM	PH3 valve closed
7/19/2012	8:05:28 AM	SiCl4 pre valve closed
7/19/2012	8:05:28 AM	SiCl4 post valve closed
7/19/2012	8:05:28 AM	Main Vac valve closed
7/19/2012	8:05:28 AM	Bypass valve closed
7/19/2012	8:05:28 AM	Helium valve opened
7/19/2012	8:05:28 AM	Bubbler valve opened
7/19/2012	8:05:28 AM	Helium MFC set to  400.000000
7/19/2012	8:05:28 AM	H2 MFC set to  0.000000
7/19/2012	8:05:28 AM	BCl3 MFC set to  0.000000
7/19/2012	8:05:28 AM	PH3 MFC set to  0.000000
7/19/2012	8:05:28 AM	SiCl4 MFC set to  0.000000
7/19/2012	8:05:28 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:05:28 AM	Tube furnace set to 0
7/19/2012	8:09:50 AM	Run aborted at 8:09 AM
7/19/2012	8:09:50 AM	Helium valve closed
7/19/2012	8:09:50 AM	H2 valve closed
7/19/2012	8:09:50 AM	BCl3 valve closed
7/19/2012	8:09:50 AM	PH3 valve closed
7/19/2012	8:09:50 AM	SiCl4 pre valve closed
7/19/2012	8:09:50 AM	SiCl4 post valve closed
7/19/2012	8:09:50 AM	Bypass valve closed
7/19/2012	8:09:50 AM	Main Vac valve closed
7/19/2012	8:09:50 AM	Bubbler valve closed
7/19/2012	8:09:50 AM	Helium MFC set to  0.000000
7/19/2012	8:09:50 AM	H2 MFC set to  0.000000
7/19/2012	8:09:50 AM	BCl3 MFC set to  0.000000
7/19/2012	8:09:50 AM	PH3 MFC set to  0.000000
7/19/2012	8:09:50 AM	SiCl4 MFC set to  0.000000
7/19/2012	8:09:50 AM	Tube furnace set to 0
7/19/2012	8:09:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2012	8:09:54 AM	Recipe started at 8:09 AM
7/19/2012	8:09:54 AM	Helium valve closed
7/19/2012	8:09:54 AM	H2 valve closed
7/19/2012	8:09:54 AM	BCl3 valve closed
7/19/2012	8:09:54 AM	PH3 valve closed
7/19/2012	8:09:54 AM	SiCl4 pre valve closed
7/19/2012	8:09:54 AM	SiCl4 post valve closed
7/19/2012	8:09:54 AM	Main Vac valve closed
7/19/2012	8:09:54 AM	Bypass valve closed
7/19/2012	8:09:54 AM	Bubbler valve closed
7/19/2012	8:09:54 AM	Helium MFC set to  0.000000
7/19/2012	8:09:54 AM	H2 MFC set to  0.000000
7/19/2012	8:09:54 AM	BCl3 MFC set to  0.000000
7/19/2012	8:09:54 AM	PH3 MFC set to  0.000000
7/19/2012	8:09:54 AM	SiCl4 MFC set to  0.000000
7/19/2012	8:09:54 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:09:54 AM	Tube furnace set to 0
7/19/2012	8:09:57 AM	H2 valve closed
7/19/2012	8:09:57 AM	BCl3 valve closed
7/19/2012	8:09:57 AM	PH3 valve closed
7/19/2012	8:09:57 AM	SiCl4 pre valve closed
7/19/2012	8:09:57 AM	SiCl4 post valve closed
7/19/2012	8:09:57 AM	Main Vac valve closed
7/19/2012	8:09:57 AM	Bypass valve closed
7/19/2012	8:09:57 AM	Bubbler valve closed
7/19/2012	8:09:57 AM	Helium valve opened
7/19/2012	8:09:57 AM	Helium MFC set to  500.000000
7/19/2012	8:09:57 AM	H2 MFC set to  0.000000
7/19/2012	8:09:57 AM	BCl3 MFC set to  0.000000
7/19/2012	8:09:57 AM	PH3 MFC set to  0.000000
7/19/2012	8:09:57 AM	SiCl4 MFC set to  0.000000
7/19/2012	8:09:57 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:09:57 AM	Tube furnace set to 0
7/19/2012	8:09:58 AM	Helium valve closed
7/19/2012	8:09:58 AM	H2 valve closed
7/19/2012	8:09:58 AM	BCl3 valve closed
7/19/2012	8:09:58 AM	PH3 valve closed
7/19/2012	8:09:58 AM	SiCl4 pre valve closed
7/19/2012	8:09:58 AM	SiCl4 post valve closed
7/19/2012	8:09:58 AM	Main Vac valve closed
7/19/2012	8:09:58 AM	Bypass valve closed
7/19/2012	8:09:58 AM	Bubbler valve closed
7/19/2012	8:09:58 AM	Helium MFC set to  0.000000
7/19/2012	8:09:58 AM	H2 MFC set to  0.000000
7/19/2012	8:09:58 AM	BCl3 MFC set to  0.000000
7/19/2012	8:09:58 AM	PH3 MFC set to  0.000000
7/19/2012	8:09:58 AM	SiCl4 MFC set to  0.000000
7/19/2012	8:09:58 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:09:58 AM	Tube furnace set to 0
7/19/2012	8:09:59 AM	Run finished at 8:09 AM
7/19/2012	8:09:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2012	8:16:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2012	8:16:33 AM	Recipe started at 8:16 AM
7/19/2012	8:16:33 AM	Helium valve closed
7/19/2012	8:16:33 AM	H2 valve closed
7/19/2012	8:16:33 AM	BCl3 valve closed
7/19/2012	8:16:33 AM	PH3 valve closed
7/19/2012	8:16:33 AM	SiCl4 pre valve closed
7/19/2012	8:16:33 AM	SiCl4 post valve closed
7/19/2012	8:16:33 AM	Main Vac valve closed
7/19/2012	8:16:33 AM	Bubbler valve closed
7/19/2012	8:16:33 AM	Bypass valve opened
7/19/2012	8:16:33 AM	Helium MFC set to  0.000000
7/19/2012	8:16:33 AM	H2 MFC set to  0.000000
7/19/2012	8:16:33 AM	BCl3 MFC set to  0.000000
7/19/2012	8:16:33 AM	PH3 MFC set to  0.000000
7/19/2012	8:16:33 AM	SiCl4 MFC set to  0.000000
7/19/2012	8:16:33 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:16:33 AM	Tube furnace set to 0
7/19/2012	8:17:44 AM	Helium valve closed
7/19/2012	8:17:44 AM	H2 valve closed
7/19/2012	8:17:44 AM	BCl3 valve closed
7/19/2012	8:17:44 AM	PH3 valve closed
7/19/2012	8:17:44 AM	SiCl4 pre valve closed
7/19/2012	8:17:44 AM	SiCl4 post valve closed
7/19/2012	8:17:44 AM	Main Vac valve closed
7/19/2012	8:17:44 AM	Bubbler valve closed
7/19/2012	8:17:44 AM	Bypass valve opened
7/19/2012	8:17:44 AM	Helium MFC set to  0.000000
7/19/2012	8:17:44 AM	H2 MFC set to  0.000000
7/19/2012	8:17:44 AM	BCl3 MFC set to  0.000000
7/19/2012	8:17:44 AM	PH3 MFC set to  0.000000
7/19/2012	8:17:44 AM	SiCl4 MFC set to  0.000000
7/19/2012	8:17:44 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:17:44 AM	Tube furnace set to 0
7/19/2012	8:18:44 AM	Helium valve closed
7/19/2012	8:18:44 AM	H2 valve closed
7/19/2012	8:18:44 AM	BCl3 valve closed
7/19/2012	8:18:44 AM	PH3 valve closed
7/19/2012	8:18:44 AM	SiCl4 pre valve closed
7/19/2012	8:18:44 AM	SiCl4 post valve closed
7/19/2012	8:18:44 AM	Bypass valve closed
7/19/2012	8:18:44 AM	Bubbler valve closed
7/19/2012	8:18:44 AM	Main Vac valve opened
7/19/2012	8:18:44 AM	Helium MFC set to  0.000000
7/19/2012	8:18:44 AM	H2 MFC set to  0.000000
7/19/2012	8:18:44 AM	BCl3 MFC set to  0.000000
7/19/2012	8:18:44 AM	PH3 MFC set to  0.000000
7/19/2012	8:18:44 AM	SiCl4 MFC set to  0.000000
7/19/2012	8:18:44 AM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:18:45 AM	Tube furnace set to 0
7/19/2012	8:18:45 AM	Run finished at 8:18 AM
7/19/2012	8:18:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2012	1:02:06 PM	Main Vac valve closed
7/19/2012	1:02:20 PM	Main Vac valve opened
7/19/2012	1:02:48 PM	Recipe started at 1:02 PM
7/19/2012	1:02:48 PM	Helium valve closed
7/19/2012	1:02:48 PM	H2 valve closed
7/19/2012	1:02:48 PM	BCl3 valve closed
7/19/2012	1:02:48 PM	PH3 valve closed
7/19/2012	1:02:48 PM	SiCl4 pre valve closed
7/19/2012	1:02:48 PM	SiCl4 post valve closed
7/19/2012	1:02:48 PM	Main Vac valve closed
7/19/2012	1:02:48 PM	Bypass valve closed
7/19/2012	1:02:48 PM	Bubbler valve closed
7/19/2012	1:02:48 PM	Helium MFC set to  0.000000
7/19/2012	1:02:48 PM	H2 MFC set to  0.000000
7/19/2012	1:02:48 PM	BCl3 MFC set to  0.000000
7/19/2012	1:02:48 PM	PH3 MFC set to  0.000000
7/19/2012	1:02:48 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:02:48 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:02:49 PM	Tube furnace set to 0
7/19/2012	1:02:52 PM	Helium valve closed
7/19/2012	1:02:52 PM	BCl3 valve closed
7/19/2012	1:02:52 PM	PH3 valve closed
7/19/2012	1:02:52 PM	SiCl4 pre valve closed
7/19/2012	1:02:52 PM	SiCl4 post valve closed
7/19/2012	1:02:52 PM	Main Vac valve closed
7/19/2012	1:02:52 PM	Bypass valve closed
7/19/2012	1:02:52 PM	Bubbler valve closed
7/19/2012	1:02:52 PM	H2 valve opened
7/19/2012	1:02:52 PM	Helium MFC set to  0.000000
7/19/2012	1:02:52 PM	H2 MFC set to  500.000000
7/19/2012	1:02:52 PM	BCl3 MFC set to  0.000000
7/19/2012	1:02:52 PM	PH3 MFC set to  0.000000
7/19/2012	1:02:52 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:02:52 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:02:52 PM	Tube furnace set to 50
7/19/2012	1:04:08 PM	Helium valve closed
7/19/2012	1:04:08 PM	BCl3 valve closed
7/19/2012	1:04:08 PM	PH3 valve closed
7/19/2012	1:04:08 PM	SiCl4 pre valve closed
7/19/2012	1:04:08 PM	SiCl4 post valve closed
7/19/2012	1:04:08 PM	Main Vac valve closed
7/19/2012	1:04:08 PM	Bypass valve closed
7/19/2012	1:04:08 PM	H2 valve opened
7/19/2012	1:04:08 PM	Bubbler valve opened
7/19/2012	1:04:08 PM	Helium MFC set to  0.000000
7/19/2012	1:04:08 PM	H2 MFC set to  500.000000
7/19/2012	1:04:08 PM	BCl3 MFC set to  0.000000
7/19/2012	1:04:08 PM	PH3 MFC set to  0.000000
7/19/2012	1:04:08 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:04:08 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:04:08 PM	Tube furnace set to 50
7/19/2012	1:04:09 PM	Helium valve closed
7/19/2012	1:04:09 PM	BCl3 valve closed
7/19/2012	1:04:09 PM	PH3 valve closed
7/19/2012	1:04:09 PM	SiCl4 pre valve closed
7/19/2012	1:04:09 PM	SiCl4 post valve closed
7/19/2012	1:04:09 PM	Main Vac valve closed
7/19/2012	1:04:09 PM	Bypass valve closed
7/19/2012	1:04:09 PM	H2 valve opened
7/19/2012	1:04:09 PM	Bubbler valve opened
7/19/2012	1:04:09 PM	Helium MFC set to  0.000000
7/19/2012	1:04:09 PM	H2 MFC set to  500.000000
7/19/2012	1:04:09 PM	BCl3 MFC set to  0.000000
7/19/2012	1:04:09 PM	PH3 MFC set to  0.000000
7/19/2012	1:04:09 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:04:09 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:04:09 PM	Tube furnace set to 1000
7/19/2012	1:24:09 PM	Helium valve closed
7/19/2012	1:24:09 PM	BCl3 valve closed
7/19/2012	1:24:09 PM	PH3 valve closed
7/19/2012	1:24:09 PM	Main Vac valve closed
7/19/2012	1:24:09 PM	Bypass valve closed
7/19/2012	1:24:09 PM	H2 valve opened
7/19/2012	1:24:09 PM	SiCl4 pre valve opened
7/19/2012	1:24:09 PM	SiCl4 post valve opened
7/19/2012	1:24:09 PM	Bubbler valve opened
7/19/2012	1:24:10 PM	Helium MFC set to  0.000000
7/19/2012	1:24:10 PM	H2 MFC set to  500.000000
7/19/2012	1:24:10 PM	BCl3 MFC set to  0.000000
7/19/2012	1:24:10 PM	PH3 MFC set to  0.000000
7/19/2012	1:24:10 PM	SiCl4 MFC set to  50.000000
7/19/2012	1:24:10 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:24:10 PM	Tube furnace set to 1000
7/19/2012	1:32:40 PM	Helium valve closed
7/19/2012	1:32:40 PM	BCl3 valve closed
7/19/2012	1:32:40 PM	PH3 valve closed
7/19/2012	1:32:40 PM	SiCl4 pre valve closed
7/19/2012	1:32:40 PM	SiCl4 post valve closed
7/19/2012	1:32:40 PM	Main Vac valve closed
7/19/2012	1:32:40 PM	Bypass valve closed
7/19/2012	1:32:40 PM	H2 valve opened
7/19/2012	1:32:40 PM	Bubbler valve opened
7/19/2012	1:32:40 PM	Helium MFC set to  0.000000
7/19/2012	1:32:40 PM	H2 MFC set to  500.000000
7/19/2012	1:32:40 PM	BCl3 MFC set to  0.000000
7/19/2012	1:32:40 PM	PH3 MFC set to  0.000000
7/19/2012	1:32:40 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:32:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:32:40 PM	Tube furnace set to 750
7/19/2012	1:42:40 PM	H2 valve closed
7/19/2012	1:42:40 PM	BCl3 valve closed
7/19/2012	1:42:40 PM	PH3 valve closed
7/19/2012	1:42:40 PM	SiCl4 pre valve closed
7/19/2012	1:42:40 PM	SiCl4 post valve closed
7/19/2012	1:42:40 PM	Main Vac valve closed
7/19/2012	1:42:40 PM	Bypass valve closed
7/19/2012	1:42:40 PM	Helium valve opened
7/19/2012	1:42:40 PM	Bubbler valve opened
7/19/2012	1:42:40 PM	Helium MFC set to  400.000000
7/19/2012	1:42:40 PM	H2 MFC set to  0.000000
7/19/2012	1:42:40 PM	BCl3 MFC set to  0.000000
7/19/2012	1:42:40 PM	PH3 MFC set to  0.000000
7/19/2012	1:42:40 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:42:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:42:40 PM	Tube furnace set to 0
7/19/2012	1:46:40 PM	Run aborted at 1:46 PM
7/19/2012	1:46:40 PM	Helium valve closed
7/19/2012	1:46:40 PM	H2 valve closed
7/19/2012	1:46:40 PM	BCl3 valve closed
7/19/2012	1:46:40 PM	PH3 valve closed
7/19/2012	1:46:40 PM	SiCl4 pre valve closed
7/19/2012	1:46:40 PM	SiCl4 post valve closed
7/19/2012	1:46:40 PM	Bypass valve closed
7/19/2012	1:46:40 PM	Main Vac valve closed
7/19/2012	1:46:40 PM	Bubbler valve closed
7/19/2012	1:46:40 PM	Helium MFC set to  0.000000
7/19/2012	1:46:40 PM	H2 MFC set to  0.000000
7/19/2012	1:46:40 PM	BCl3 MFC set to  0.000000
7/19/2012	1:46:40 PM	PH3 MFC set to  0.000000
7/19/2012	1:46:40 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:46:40 PM	Tube furnace set to 0
7/19/2012	1:46:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2012	1:46:43 PM	Recipe started at 1:46 PM
7/19/2012	1:46:43 PM	Helium valve closed
7/19/2012	1:46:43 PM	H2 valve closed
7/19/2012	1:46:43 PM	BCl3 valve closed
7/19/2012	1:46:43 PM	PH3 valve closed
7/19/2012	1:46:43 PM	SiCl4 pre valve closed
7/19/2012	1:46:43 PM	SiCl4 post valve closed
7/19/2012	1:46:43 PM	Main Vac valve closed
7/19/2012	1:46:43 PM	Bypass valve closed
7/19/2012	1:46:43 PM	Bubbler valve closed
7/19/2012	1:46:43 PM	Helium MFC set to  0.000000
7/19/2012	1:46:43 PM	H2 MFC set to  0.000000
7/19/2012	1:46:43 PM	BCl3 MFC set to  0.000000
7/19/2012	1:46:43 PM	PH3 MFC set to  0.000000
7/19/2012	1:46:43 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:46:43 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:46:43 PM	Tube furnace set to 0
7/19/2012	1:46:46 PM	H2 valve closed
7/19/2012	1:46:46 PM	BCl3 valve closed
7/19/2012	1:46:46 PM	PH3 valve closed
7/19/2012	1:46:46 PM	SiCl4 pre valve closed
7/19/2012	1:46:46 PM	SiCl4 post valve closed
7/19/2012	1:46:46 PM	Main Vac valve closed
7/19/2012	1:46:46 PM	Bypass valve closed
7/19/2012	1:46:46 PM	Bubbler valve closed
7/19/2012	1:46:46 PM	Helium valve opened
7/19/2012	1:46:46 PM	Helium MFC set to  500.000000
7/19/2012	1:46:46 PM	H2 MFC set to  0.000000
7/19/2012	1:46:46 PM	BCl3 MFC set to  0.000000
7/19/2012	1:46:46 PM	PH3 MFC set to  0.000000
7/19/2012	1:46:46 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:46:46 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:46:46 PM	Tube furnace set to 0
7/19/2012	1:46:46 PM	Helium valve closed
7/19/2012	1:46:46 PM	H2 valve closed
7/19/2012	1:46:46 PM	BCl3 valve closed
7/19/2012	1:46:46 PM	PH3 valve closed
7/19/2012	1:46:46 PM	SiCl4 pre valve closed
7/19/2012	1:46:46 PM	SiCl4 post valve closed
7/19/2012	1:46:46 PM	Main Vac valve closed
7/19/2012	1:46:46 PM	Bypass valve closed
7/19/2012	1:46:46 PM	Bubbler valve closed
7/19/2012	1:46:46 PM	Helium MFC set to  0.000000
7/19/2012	1:46:46 PM	H2 MFC set to  0.000000
7/19/2012	1:46:46 PM	BCl3 MFC set to  0.000000
7/19/2012	1:46:46 PM	PH3 MFC set to  0.000000
7/19/2012	1:46:46 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:46:46 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:46:47 PM	Tube furnace set to 0
7/19/2012	1:46:48 PM	Run finished at 1:46 PM
7/19/2012	1:46:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2012	1:53:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2012	1:53:04 PM	Recipe started at 1:53 PM
7/19/2012	1:53:04 PM	Helium valve closed
7/19/2012	1:53:04 PM	H2 valve closed
7/19/2012	1:53:04 PM	BCl3 valve closed
7/19/2012	1:53:04 PM	PH3 valve closed
7/19/2012	1:53:04 PM	SiCl4 pre valve closed
7/19/2012	1:53:04 PM	SiCl4 post valve closed
7/19/2012	1:53:04 PM	Main Vac valve closed
7/19/2012	1:53:04 PM	Bubbler valve closed
7/19/2012	1:53:04 PM	Bypass valve opened
7/19/2012	1:53:04 PM	Helium MFC set to  0.000000
7/19/2012	1:53:04 PM	H2 MFC set to  0.000000
7/19/2012	1:53:04 PM	BCl3 MFC set to  0.000000
7/19/2012	1:53:04 PM	PH3 MFC set to  0.000000
7/19/2012	1:53:04 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:53:04 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:53:05 PM	Tube furnace set to 0
7/19/2012	1:54:16 PM	Helium valve closed
7/19/2012	1:54:16 PM	H2 valve closed
7/19/2012	1:54:16 PM	BCl3 valve closed
7/19/2012	1:54:16 PM	PH3 valve closed
7/19/2012	1:54:16 PM	SiCl4 pre valve closed
7/19/2012	1:54:16 PM	SiCl4 post valve closed
7/19/2012	1:54:16 PM	Main Vac valve closed
7/19/2012	1:54:16 PM	Bubbler valve closed
7/19/2012	1:54:16 PM	Bypass valve opened
7/19/2012	1:54:16 PM	Helium MFC set to  0.000000
7/19/2012	1:54:16 PM	H2 MFC set to  0.000000
7/19/2012	1:54:16 PM	BCl3 MFC set to  0.000000
7/19/2012	1:54:16 PM	PH3 MFC set to  0.000000
7/19/2012	1:54:16 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:54:16 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:54:16 PM	Tube furnace set to 0
7/19/2012	1:55:16 PM	Helium valve closed
7/19/2012	1:55:16 PM	H2 valve closed
7/19/2012	1:55:16 PM	BCl3 valve closed
7/19/2012	1:55:16 PM	PH3 valve closed
7/19/2012	1:55:16 PM	SiCl4 pre valve closed
7/19/2012	1:55:16 PM	SiCl4 post valve closed
7/19/2012	1:55:16 PM	Bypass valve closed
7/19/2012	1:55:16 PM	Bubbler valve closed
7/19/2012	1:55:16 PM	Main Vac valve opened
7/19/2012	1:55:16 PM	Helium MFC set to  0.000000
7/19/2012	1:55:16 PM	H2 MFC set to  0.000000
7/19/2012	1:55:16 PM	BCl3 MFC set to  0.000000
7/19/2012	1:55:16 PM	PH3 MFC set to  0.000000
7/19/2012	1:55:16 PM	SiCl4 MFC set to  0.000000
7/19/2012	1:55:16 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	1:55:17 PM	Tube furnace set to 0
7/19/2012	1:55:18 PM	Run finished at 1:55 PM
7/19/2012	1:55:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2012	2:39:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2012	2:39:28 PM	Recipe started at 2:39 PM
7/19/2012	2:39:28 PM	Helium valve closed
7/19/2012	2:39:28 PM	H2 valve closed
7/19/2012	2:39:29 PM	BCl3 valve closed
7/19/2012	2:39:29 PM	PH3 valve closed
7/19/2012	2:39:29 PM	SiCl4 pre valve closed
7/19/2012	2:39:29 PM	SiCl4 post valve closed
7/19/2012	2:39:29 PM	Main Vac valve closed
7/19/2012	2:39:29 PM	Bubbler valve closed
7/19/2012	2:39:29 PM	Bypass valve opened
7/19/2012	2:39:29 PM	Helium MFC set to  0.000000
7/19/2012	2:39:29 PM	H2 MFC set to  0.000000
7/19/2012	2:39:29 PM	BCl3 MFC set to  0.000000
7/19/2012	2:39:29 PM	PH3 MFC set to  0.000000
7/19/2012	2:39:29 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:39:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:39:29 PM	Tube furnace set to 0
7/19/2012	2:39:29 PM	Helium valve closed
7/19/2012	2:39:29 PM	H2 valve closed
7/19/2012	2:39:29 PM	BCl3 valve closed
7/19/2012	2:39:29 PM	PH3 valve closed
7/19/2012	2:39:29 PM	SiCl4 pre valve closed
7/19/2012	2:39:29 PM	SiCl4 post valve closed
7/19/2012	2:39:29 PM	Main Vac valve closed
7/19/2012	2:39:29 PM	Bubbler valve closed
7/19/2012	2:39:29 PM	Bypass valve opened
7/19/2012	2:39:29 PM	Helium MFC set to  0.000000
7/19/2012	2:39:29 PM	H2 MFC set to  0.000000
7/19/2012	2:39:29 PM	BCl3 MFC set to  0.000000
7/19/2012	2:39:29 PM	PH3 MFC set to  0.000000
7/19/2012	2:39:29 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:39:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:39:29 PM	Tube furnace set to 0
7/19/2012	2:39:59 PM	Helium valve closed
7/19/2012	2:39:59 PM	H2 valve closed
7/19/2012	2:39:59 PM	BCl3 valve closed
7/19/2012	2:39:59 PM	PH3 valve closed
7/19/2012	2:39:59 PM	SiCl4 pre valve closed
7/19/2012	2:39:59 PM	SiCl4 post valve closed
7/19/2012	2:39:59 PM	Bypass valve closed
7/19/2012	2:39:59 PM	Bubbler valve closed
7/19/2012	2:39:59 PM	Main Vac valve opened
7/19/2012	2:39:59 PM	Helium MFC set to  0.000000
7/19/2012	2:39:59 PM	H2 MFC set to  0.000000
7/19/2012	2:39:59 PM	BCl3 MFC set to  0.000000
7/19/2012	2:39:59 PM	PH3 MFC set to  0.000000
7/19/2012	2:39:59 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:39:59 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:39:59 PM	Tube furnace set to 0
7/19/2012	2:40:29 PM	H2 valve closed
7/19/2012	2:40:29 PM	BCl3 valve closed
7/19/2012	2:40:29 PM	PH3 valve closed
7/19/2012	2:40:29 PM	SiCl4 pre valve closed
7/19/2012	2:40:29 PM	SiCl4 post valve closed
7/19/2012	2:40:29 PM	Bypass valve closed
7/19/2012	2:40:29 PM	Bubbler valve closed
7/19/2012	2:40:29 PM	Helium valve opened
7/19/2012	2:40:29 PM	Main Vac valve opened
7/19/2012	2:40:29 PM	Helium MFC set to  20.000000
7/19/2012	2:40:29 PM	H2 MFC set to  0.000000
7/19/2012	2:40:29 PM	BCl3 MFC set to  0.000000
7/19/2012	2:40:30 PM	PH3 MFC set to  0.000000
7/19/2012	2:40:30 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:40:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:40:30 PM	Tube furnace set to 0
7/19/2012	2:41:00 PM	Helium valve closed
7/19/2012	2:41:00 PM	H2 valve closed
7/19/2012	2:41:00 PM	BCl3 valve closed
7/19/2012	2:41:00 PM	PH3 valve closed
7/19/2012	2:41:00 PM	SiCl4 pre valve closed
7/19/2012	2:41:00 PM	SiCl4 post valve closed
7/19/2012	2:41:00 PM	Bypass valve closed
7/19/2012	2:41:00 PM	Bubbler valve closed
7/19/2012	2:41:00 PM	Main Vac valve opened
7/19/2012	2:41:00 PM	Helium MFC set to  0.000000
7/19/2012	2:41:00 PM	H2 MFC set to  0.000000
7/19/2012	2:41:00 PM	BCl3 MFC set to  0.000000
7/19/2012	2:41:00 PM	PH3 MFC set to  0.000000
7/19/2012	2:41:00 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:41:00 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:41:00 PM	Tube furnace set to 0
7/19/2012	2:41:30 PM	H2 valve closed
7/19/2012	2:41:30 PM	BCl3 valve closed
7/19/2012	2:41:30 PM	PH3 valve closed
7/19/2012	2:41:30 PM	SiCl4 pre valve closed
7/19/2012	2:41:30 PM	SiCl4 post valve closed
7/19/2012	2:41:30 PM	Bypass valve closed
7/19/2012	2:41:30 PM	Bubbler valve closed
7/19/2012	2:41:30 PM	Helium valve opened
7/19/2012	2:41:30 PM	Main Vac valve opened
7/19/2012	2:41:30 PM	Helium MFC set to  20.000000
7/19/2012	2:41:30 PM	H2 MFC set to  0.000000
7/19/2012	2:41:30 PM	BCl3 MFC set to  0.000000
7/19/2012	2:41:30 PM	PH3 MFC set to  0.000000
7/19/2012	2:41:30 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:41:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:41:30 PM	Tube furnace set to 0
7/19/2012	2:42:00 PM	Helium valve closed
7/19/2012	2:42:00 PM	H2 valve closed
7/19/2012	2:42:00 PM	BCl3 valve closed
7/19/2012	2:42:00 PM	PH3 valve closed
7/19/2012	2:42:00 PM	SiCl4 pre valve closed
7/19/2012	2:42:00 PM	SiCl4 post valve closed
7/19/2012	2:42:00 PM	Bypass valve closed
7/19/2012	2:42:00 PM	Bubbler valve closed
7/19/2012	2:42:00 PM	Main Vac valve opened
7/19/2012	2:42:00 PM	Helium MFC set to  0.000000
7/19/2012	2:42:00 PM	H2 MFC set to  0.000000
7/19/2012	2:42:00 PM	BCl3 MFC set to  0.000000
7/19/2012	2:42:00 PM	PH3 MFC set to  0.000000
7/19/2012	2:42:00 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:42:00 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:42:00 PM	Tube furnace set to 0
7/19/2012	2:42:30 PM	H2 valve closed
7/19/2012	2:42:30 PM	BCl3 valve closed
7/19/2012	2:42:30 PM	PH3 valve closed
7/19/2012	2:42:30 PM	SiCl4 pre valve closed
7/19/2012	2:42:30 PM	SiCl4 post valve closed
7/19/2012	2:42:30 PM	Bypass valve closed
7/19/2012	2:42:30 PM	Bubbler valve closed
7/19/2012	2:42:30 PM	Helium valve opened
7/19/2012	2:42:30 PM	Main Vac valve opened
7/19/2012	2:42:30 PM	Helium MFC set to  20.000000
7/19/2012	2:42:30 PM	H2 MFC set to  0.000000
7/19/2012	2:42:30 PM	BCl3 MFC set to  0.000000
7/19/2012	2:42:30 PM	PH3 MFC set to  0.000000
7/19/2012	2:42:30 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:42:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:42:31 PM	Tube furnace set to 0
7/19/2012	2:43:01 PM	Helium valve closed
7/19/2012	2:43:01 PM	H2 valve closed
7/19/2012	2:43:01 PM	BCl3 valve closed
7/19/2012	2:43:01 PM	PH3 valve closed
7/19/2012	2:43:01 PM	SiCl4 pre valve closed
7/19/2012	2:43:01 PM	SiCl4 post valve closed
7/19/2012	2:43:01 PM	Bypass valve closed
7/19/2012	2:43:01 PM	Bubbler valve closed
7/19/2012	2:43:01 PM	Main Vac valve opened
7/19/2012	2:43:01 PM	Helium MFC set to  0.000000
7/19/2012	2:43:01 PM	H2 MFC set to  0.000000
7/19/2012	2:43:01 PM	BCl3 MFC set to  0.000000
7/19/2012	2:43:01 PM	PH3 MFC set to  0.000000
7/19/2012	2:43:01 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:43:01 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:43:01 PM	Tube furnace set to 0
7/19/2012	2:43:31 PM	H2 valve closed
7/19/2012	2:43:31 PM	BCl3 valve closed
7/19/2012	2:43:31 PM	PH3 valve closed
7/19/2012	2:43:31 PM	SiCl4 pre valve closed
7/19/2012	2:43:31 PM	SiCl4 post valve closed
7/19/2012	2:43:31 PM	Bypass valve closed
7/19/2012	2:43:31 PM	Bubbler valve closed
7/19/2012	2:43:31 PM	Helium valve opened
7/19/2012	2:43:31 PM	Main Vac valve opened
7/19/2012	2:43:31 PM	Helium MFC set to  20.000000
7/19/2012	2:43:31 PM	H2 MFC set to  0.000000
7/19/2012	2:43:31 PM	BCl3 MFC set to  0.000000
7/19/2012	2:43:31 PM	PH3 MFC set to  0.000000
7/19/2012	2:43:31 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:43:31 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:43:31 PM	Tube furnace set to 0
7/19/2012	2:44:01 PM	Helium valve closed
7/19/2012	2:44:01 PM	H2 valve closed
7/19/2012	2:44:01 PM	BCl3 valve closed
7/19/2012	2:44:01 PM	PH3 valve closed
7/19/2012	2:44:01 PM	SiCl4 pre valve closed
7/19/2012	2:44:01 PM	SiCl4 post valve closed
7/19/2012	2:44:01 PM	Bypass valve closed
7/19/2012	2:44:01 PM	Bubbler valve closed
7/19/2012	2:44:01 PM	Main Vac valve opened
7/19/2012	2:44:01 PM	Helium MFC set to  0.000000
7/19/2012	2:44:01 PM	H2 MFC set to  0.000000
7/19/2012	2:44:01 PM	BCl3 MFC set to  0.000000
7/19/2012	2:44:01 PM	PH3 MFC set to  0.000000
7/19/2012	2:44:01 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:44:01 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:44:01 PM	Tube furnace set to 0
7/19/2012	2:44:31 PM	H2 valve closed
7/19/2012	2:44:31 PM	BCl3 valve closed
7/19/2012	2:44:31 PM	PH3 valve closed
7/19/2012	2:44:31 PM	SiCl4 pre valve closed
7/19/2012	2:44:31 PM	SiCl4 post valve closed
7/19/2012	2:44:31 PM	Bypass valve closed
7/19/2012	2:44:31 PM	Bubbler valve closed
7/19/2012	2:44:31 PM	Helium valve opened
7/19/2012	2:44:31 PM	Main Vac valve opened
7/19/2012	2:44:31 PM	Helium MFC set to  20.000000
7/19/2012	2:44:31 PM	H2 MFC set to  0.000000
7/19/2012	2:44:31 PM	BCl3 MFC set to  0.000000
7/19/2012	2:44:31 PM	PH3 MFC set to  0.000000
7/19/2012	2:44:31 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:44:31 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:44:32 PM	Tube furnace set to 0
7/19/2012	2:45:02 PM	Helium valve closed
7/19/2012	2:45:02 PM	H2 valve closed
7/19/2012	2:45:02 PM	BCl3 valve closed
7/19/2012	2:45:02 PM	PH3 valve closed
7/19/2012	2:45:02 PM	SiCl4 pre valve closed
7/19/2012	2:45:02 PM	SiCl4 post valve closed
7/19/2012	2:45:02 PM	Bypass valve closed
7/19/2012	2:45:02 PM	Bubbler valve closed
7/19/2012	2:45:02 PM	Main Vac valve opened
7/19/2012	2:45:02 PM	Helium MFC set to  0.000000
7/19/2012	2:45:02 PM	H2 MFC set to  0.000000
7/19/2012	2:45:02 PM	BCl3 MFC set to  0.000000
7/19/2012	2:45:02 PM	PH3 MFC set to  0.000000
7/19/2012	2:45:02 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:45:02 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:45:02 PM	Tube furnace set to 0
7/19/2012	2:45:32 PM	H2 valve closed
7/19/2012	2:45:32 PM	BCl3 valve closed
7/19/2012	2:45:32 PM	PH3 valve closed
7/19/2012	2:45:32 PM	SiCl4 pre valve closed
7/19/2012	2:45:32 PM	SiCl4 post valve closed
7/19/2012	2:45:32 PM	Bypass valve closed
7/19/2012	2:45:32 PM	Bubbler valve closed
7/19/2012	2:45:32 PM	Helium valve opened
7/19/2012	2:45:32 PM	Main Vac valve opened
7/19/2012	2:45:32 PM	Helium MFC set to  20.000000
7/19/2012	2:45:32 PM	H2 MFC set to  0.000000
7/19/2012	2:45:32 PM	BCl3 MFC set to  0.000000
7/19/2012	2:45:32 PM	PH3 MFC set to  0.000000
7/19/2012	2:45:32 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:45:32 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:45:32 PM	Tube furnace set to 0
7/19/2012	2:46:02 PM	Helium valve closed
7/19/2012	2:46:02 PM	H2 valve closed
7/19/2012	2:46:02 PM	BCl3 valve closed
7/19/2012	2:46:02 PM	PH3 valve closed
7/19/2012	2:46:02 PM	SiCl4 pre valve closed
7/19/2012	2:46:02 PM	SiCl4 post valve closed
7/19/2012	2:46:02 PM	Bypass valve closed
7/19/2012	2:46:02 PM	Bubbler valve closed
7/19/2012	2:46:02 PM	Main Vac valve opened
7/19/2012	2:46:02 PM	Helium MFC set to  0.000000
7/19/2012	2:46:02 PM	H2 MFC set to  0.000000
7/19/2012	2:46:02 PM	BCl3 MFC set to  0.000000
7/19/2012	2:46:02 PM	PH3 MFC set to  0.000000
7/19/2012	2:46:02 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:46:02 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:46:02 PM	Tube furnace set to 0
7/19/2012	2:46:32 PM	H2 valve closed
7/19/2012	2:46:32 PM	BCl3 valve closed
7/19/2012	2:46:32 PM	PH3 valve closed
7/19/2012	2:46:32 PM	SiCl4 pre valve closed
7/19/2012	2:46:32 PM	SiCl4 post valve closed
7/19/2012	2:46:32 PM	Bypass valve closed
7/19/2012	2:46:32 PM	Bubbler valve closed
7/19/2012	2:46:32 PM	Helium valve opened
7/19/2012	2:46:32 PM	Main Vac valve opened
7/19/2012	2:46:32 PM	Helium MFC set to  20.000000
7/19/2012	2:46:32 PM	H2 MFC set to  0.000000
7/19/2012	2:46:32 PM	BCl3 MFC set to  0.000000
7/19/2012	2:46:32 PM	PH3 MFC set to  0.000000
7/19/2012	2:46:32 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:46:32 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:46:32 PM	Tube furnace set to 0
7/19/2012	2:47:03 PM	Helium valve closed
7/19/2012	2:47:03 PM	H2 valve closed
7/19/2012	2:47:03 PM	BCl3 valve closed
7/19/2012	2:47:03 PM	PH3 valve closed
7/19/2012	2:47:03 PM	SiCl4 pre valve closed
7/19/2012	2:47:03 PM	SiCl4 post valve closed
7/19/2012	2:47:03 PM	Bypass valve closed
7/19/2012	2:47:03 PM	Bubbler valve closed
7/19/2012	2:47:03 PM	Main Vac valve opened
7/19/2012	2:47:03 PM	Helium MFC set to  0.000000
7/19/2012	2:47:03 PM	H2 MFC set to  0.000000
7/19/2012	2:47:03 PM	BCl3 MFC set to  0.000000
7/19/2012	2:47:03 PM	PH3 MFC set to  0.000000
7/19/2012	2:47:03 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:47:03 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:47:03 PM	Tube furnace set to 0
7/19/2012	2:47:33 PM	H2 valve closed
7/19/2012	2:47:33 PM	BCl3 valve closed
7/19/2012	2:47:33 PM	PH3 valve closed
7/19/2012	2:47:33 PM	SiCl4 pre valve closed
7/19/2012	2:47:33 PM	SiCl4 post valve closed
7/19/2012	2:47:33 PM	Bypass valve closed
7/19/2012	2:47:33 PM	Bubbler valve closed
7/19/2012	2:47:33 PM	Helium valve opened
7/19/2012	2:47:33 PM	Main Vac valve opened
7/19/2012	2:47:33 PM	Helium MFC set to  20.000000
7/19/2012	2:47:33 PM	H2 MFC set to  0.000000
7/19/2012	2:47:33 PM	BCl3 MFC set to  0.000000
7/19/2012	2:47:33 PM	PH3 MFC set to  0.000000
7/19/2012	2:47:33 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:47:33 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:47:33 PM	Tube furnace set to 0
7/19/2012	2:48:03 PM	Helium valve closed
7/19/2012	2:48:03 PM	H2 valve closed
7/19/2012	2:48:03 PM	BCl3 valve closed
7/19/2012	2:48:03 PM	PH3 valve closed
7/19/2012	2:48:03 PM	SiCl4 pre valve closed
7/19/2012	2:48:03 PM	SiCl4 post valve closed
7/19/2012	2:48:03 PM	Bypass valve closed
7/19/2012	2:48:03 PM	Bubbler valve closed
7/19/2012	2:48:03 PM	Main Vac valve opened
7/19/2012	2:48:03 PM	Helium MFC set to  0.000000
7/19/2012	2:48:03 PM	H2 MFC set to  0.000000
7/19/2012	2:48:03 PM	BCl3 MFC set to  0.000000
7/19/2012	2:48:03 PM	PH3 MFC set to  0.000000
7/19/2012	2:48:03 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:48:03 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:48:03 PM	Tube furnace set to 0
7/19/2012	2:48:33 PM	H2 valve closed
7/19/2012	2:48:33 PM	BCl3 valve closed
7/19/2012	2:48:33 PM	PH3 valve closed
7/19/2012	2:48:33 PM	SiCl4 pre valve closed
7/19/2012	2:48:33 PM	SiCl4 post valve closed
7/19/2012	2:48:33 PM	Bypass valve closed
7/19/2012	2:48:33 PM	Bubbler valve closed
7/19/2012	2:48:33 PM	Helium valve opened
7/19/2012	2:48:33 PM	Main Vac valve opened
7/19/2012	2:48:33 PM	Helium MFC set to  20.000000
7/19/2012	2:48:33 PM	H2 MFC set to  0.000000
7/19/2012	2:48:33 PM	BCl3 MFC set to  0.000000
7/19/2012	2:48:33 PM	PH3 MFC set to  0.000000
7/19/2012	2:48:33 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:48:33 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:48:33 PM	Tube furnace set to 0
7/19/2012	2:49:03 PM	Helium valve closed
7/19/2012	2:49:03 PM	H2 valve closed
7/19/2012	2:49:03 PM	BCl3 valve closed
7/19/2012	2:49:03 PM	PH3 valve closed
7/19/2012	2:49:03 PM	SiCl4 pre valve closed
7/19/2012	2:49:03 PM	SiCl4 post valve closed
7/19/2012	2:49:03 PM	Bypass valve closed
7/19/2012	2:49:03 PM	Bubbler valve closed
7/19/2012	2:49:03 PM	Main Vac valve opened
7/19/2012	2:49:03 PM	Helium MFC set to  0.000000
7/19/2012	2:49:03 PM	H2 MFC set to  0.000000
7/19/2012	2:49:03 PM	BCl3 MFC set to  0.000000
7/19/2012	2:49:04 PM	PH3 MFC set to  0.000000
7/19/2012	2:49:04 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:49:04 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:49:04 PM	Tube furnace set to 0
7/19/2012	2:49:34 PM	H2 valve closed
7/19/2012	2:49:34 PM	BCl3 valve closed
7/19/2012	2:49:34 PM	PH3 valve closed
7/19/2012	2:49:34 PM	SiCl4 pre valve closed
7/19/2012	2:49:34 PM	SiCl4 post valve closed
7/19/2012	2:49:34 PM	Bypass valve closed
7/19/2012	2:49:34 PM	Bubbler valve closed
7/19/2012	2:49:34 PM	Helium valve opened
7/19/2012	2:49:34 PM	Main Vac valve opened
7/19/2012	2:49:34 PM	Helium MFC set to  20.000000
7/19/2012	2:49:34 PM	H2 MFC set to  0.000000
7/19/2012	2:49:34 PM	BCl3 MFC set to  0.000000
7/19/2012	2:49:34 PM	PH3 MFC set to  0.000000
7/19/2012	2:49:34 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:49:34 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:49:34 PM	Tube furnace set to 0
7/19/2012	2:50:04 PM	Helium valve closed
7/19/2012	2:50:04 PM	H2 valve closed
7/19/2012	2:50:04 PM	BCl3 valve closed
7/19/2012	2:50:04 PM	PH3 valve closed
7/19/2012	2:50:04 PM	SiCl4 pre valve closed
7/19/2012	2:50:04 PM	SiCl4 post valve closed
7/19/2012	2:50:04 PM	Bypass valve closed
7/19/2012	2:50:04 PM	Bubbler valve closed
7/19/2012	2:50:04 PM	Main Vac valve opened
7/19/2012	2:50:04 PM	Helium MFC set to  0.000000
7/19/2012	2:50:04 PM	H2 MFC set to  0.000000
7/19/2012	2:50:04 PM	BCl3 MFC set to  0.000000
7/19/2012	2:50:04 PM	PH3 MFC set to  0.000000
7/19/2012	2:50:04 PM	SiCl4 MFC set to  0.000000
7/19/2012	2:50:04 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	2:50:04 PM	Tube furnace set to 0
7/19/2012	2:50:05 PM	Run finished at 2:50 PM
7/19/2012	2:50:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2012	3:11:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2012	3:11:38 PM	Recipe started at 3:11 PM
7/19/2012	3:11:39 PM	Helium valve closed
7/19/2012	3:11:39 PM	H2 valve closed
7/19/2012	3:11:39 PM	BCl3 valve closed
7/19/2012	3:11:39 PM	PH3 valve closed
7/19/2012	3:11:39 PM	SiCl4 pre valve closed
7/19/2012	3:11:39 PM	SiCl4 post valve closed
7/19/2012	3:11:39 PM	Main Vac valve closed
7/19/2012	3:11:39 PM	Bubbler valve closed
7/19/2012	3:11:39 PM	Bypass valve opened
7/19/2012	3:11:39 PM	Helium MFC set to  0.000000
7/19/2012	3:11:39 PM	H2 MFC set to  0.000000
7/19/2012	3:11:39 PM	BCl3 MFC set to  0.000000
7/19/2012	3:11:39 PM	PH3 MFC set to  0.000000
7/19/2012	3:11:39 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:11:39 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:11:39 PM	Tube furnace set to 0
7/19/2012	3:11:39 PM	Helium valve closed
7/19/2012	3:11:39 PM	H2 valve closed
7/19/2012	3:11:39 PM	BCl3 valve closed
7/19/2012	3:11:39 PM	PH3 valve closed
7/19/2012	3:11:39 PM	SiCl4 pre valve closed
7/19/2012	3:11:39 PM	SiCl4 post valve closed
7/19/2012	3:11:39 PM	Main Vac valve closed
7/19/2012	3:11:39 PM	Bubbler valve closed
7/19/2012	3:11:39 PM	Bypass valve opened
7/19/2012	3:11:39 PM	Helium MFC set to  0.000000
7/19/2012	3:11:39 PM	H2 MFC set to  0.000000
7/19/2012	3:11:39 PM	BCl3 MFC set to  0.000000
7/19/2012	3:11:39 PM	PH3 MFC set to  0.000000
7/19/2012	3:11:39 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:11:39 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:11:39 PM	Tube furnace set to 0
7/19/2012	3:12:09 PM	Helium valve closed
7/19/2012	3:12:09 PM	H2 valve closed
7/19/2012	3:12:09 PM	BCl3 valve closed
7/19/2012	3:12:09 PM	PH3 valve closed
7/19/2012	3:12:09 PM	SiCl4 pre valve closed
7/19/2012	3:12:09 PM	SiCl4 post valve closed
7/19/2012	3:12:09 PM	Bypass valve closed
7/19/2012	3:12:09 PM	Bubbler valve closed
7/19/2012	3:12:09 PM	Main Vac valve opened
7/19/2012	3:12:09 PM	Helium MFC set to  0.000000
7/19/2012	3:12:09 PM	H2 MFC set to  0.000000
7/19/2012	3:12:09 PM	BCl3 MFC set to  0.000000
7/19/2012	3:12:09 PM	PH3 MFC set to  0.000000
7/19/2012	3:12:09 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:12:09 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:12:09 PM	Tube furnace set to 0
7/19/2012	3:12:39 PM	H2 valve closed
7/19/2012	3:12:39 PM	BCl3 valve closed
7/19/2012	3:12:39 PM	PH3 valve closed
7/19/2012	3:12:39 PM	SiCl4 pre valve closed
7/19/2012	3:12:39 PM	SiCl4 post valve closed
7/19/2012	3:12:39 PM	Bypass valve closed
7/19/2012	3:12:39 PM	Bubbler valve closed
7/19/2012	3:12:40 PM	Helium valve opened
7/19/2012	3:12:40 PM	Main Vac valve opened
7/19/2012	3:12:40 PM	Helium MFC set to  20.000000
7/19/2012	3:12:40 PM	H2 MFC set to  0.000000
7/19/2012	3:12:40 PM	BCl3 MFC set to  0.000000
7/19/2012	3:12:40 PM	PH3 MFC set to  0.000000
7/19/2012	3:12:40 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:12:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:12:40 PM	Tube furnace set to 0
7/19/2012	3:13:10 PM	Helium valve closed
7/19/2012	3:13:10 PM	H2 valve closed
7/19/2012	3:13:10 PM	BCl3 valve closed
7/19/2012	3:13:10 PM	PH3 valve closed
7/19/2012	3:13:10 PM	SiCl4 pre valve closed
7/19/2012	3:13:10 PM	SiCl4 post valve closed
7/19/2012	3:13:10 PM	Bypass valve closed
7/19/2012	3:13:10 PM	Bubbler valve closed
7/19/2012	3:13:10 PM	Main Vac valve opened
7/19/2012	3:13:10 PM	Helium MFC set to  0.000000
7/19/2012	3:13:10 PM	H2 MFC set to  0.000000
7/19/2012	3:13:10 PM	BCl3 MFC set to  0.000000
7/19/2012	3:13:10 PM	PH3 MFC set to  0.000000
7/19/2012	3:13:10 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:13:10 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:13:10 PM	Tube furnace set to 0
7/19/2012	3:13:40 PM	H2 valve closed
7/19/2012	3:13:40 PM	BCl3 valve closed
7/19/2012	3:13:40 PM	PH3 valve closed
7/19/2012	3:13:40 PM	SiCl4 pre valve closed
7/19/2012	3:13:40 PM	SiCl4 post valve closed
7/19/2012	3:13:40 PM	Bypass valve closed
7/19/2012	3:13:40 PM	Bubbler valve closed
7/19/2012	3:13:40 PM	Helium valve opened
7/19/2012	3:13:40 PM	Main Vac valve opened
7/19/2012	3:13:40 PM	Helium MFC set to  20.000000
7/19/2012	3:13:40 PM	H2 MFC set to  0.000000
7/19/2012	3:13:40 PM	BCl3 MFC set to  0.000000
7/19/2012	3:13:40 PM	PH3 MFC set to  0.000000
7/19/2012	3:13:40 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:13:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:13:40 PM	Tube furnace set to 0
7/19/2012	3:14:10 PM	Helium valve closed
7/19/2012	3:14:10 PM	H2 valve closed
7/19/2012	3:14:10 PM	BCl3 valve closed
7/19/2012	3:14:10 PM	PH3 valve closed
7/19/2012	3:14:10 PM	SiCl4 pre valve closed
7/19/2012	3:14:10 PM	SiCl4 post valve closed
7/19/2012	3:14:10 PM	Bypass valve closed
7/19/2012	3:14:10 PM	Bubbler valve closed
7/19/2012	3:14:10 PM	Main Vac valve opened
7/19/2012	3:14:10 PM	Helium MFC set to  0.000000
7/19/2012	3:14:10 PM	H2 MFC set to  0.000000
7/19/2012	3:14:10 PM	BCl3 MFC set to  0.000000
7/19/2012	3:14:10 PM	PH3 MFC set to  0.000000
7/19/2012	3:14:10 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:14:10 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:14:10 PM	Tube furnace set to 0
7/19/2012	3:14:40 PM	H2 valve closed
7/19/2012	3:14:40 PM	BCl3 valve closed
7/19/2012	3:14:40 PM	PH3 valve closed
7/19/2012	3:14:40 PM	SiCl4 pre valve closed
7/19/2012	3:14:40 PM	SiCl4 post valve closed
7/19/2012	3:14:40 PM	Bypass valve closed
7/19/2012	3:14:40 PM	Bubbler valve closed
7/19/2012	3:14:40 PM	Helium valve opened
7/19/2012	3:14:40 PM	Main Vac valve opened
7/19/2012	3:14:40 PM	Helium MFC set to  20.000000
7/19/2012	3:14:40 PM	H2 MFC set to  0.000000
7/19/2012	3:14:40 PM	BCl3 MFC set to  0.000000
7/19/2012	3:14:40 PM	PH3 MFC set to  0.000000
7/19/2012	3:14:40 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:14:40 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:14:41 PM	Tube furnace set to 0
7/19/2012	3:15:11 PM	Helium valve closed
7/19/2012	3:15:11 PM	H2 valve closed
7/19/2012	3:15:11 PM	BCl3 valve closed
7/19/2012	3:15:11 PM	PH3 valve closed
7/19/2012	3:15:11 PM	SiCl4 pre valve closed
7/19/2012	3:15:11 PM	SiCl4 post valve closed
7/19/2012	3:15:11 PM	Bypass valve closed
7/19/2012	3:15:11 PM	Bubbler valve closed
7/19/2012	3:15:11 PM	Main Vac valve opened
7/19/2012	3:15:11 PM	Helium MFC set to  0.000000
7/19/2012	3:15:11 PM	H2 MFC set to  0.000000
7/19/2012	3:15:11 PM	BCl3 MFC set to  0.000000
7/19/2012	3:15:11 PM	PH3 MFC set to  0.000000
7/19/2012	3:15:11 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:15:11 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:15:11 PM	Tube furnace set to 0
7/19/2012	3:15:41 PM	H2 valve closed
7/19/2012	3:15:41 PM	BCl3 valve closed
7/19/2012	3:15:41 PM	PH3 valve closed
7/19/2012	3:15:41 PM	SiCl4 pre valve closed
7/19/2012	3:15:41 PM	SiCl4 post valve closed
7/19/2012	3:15:41 PM	Bypass valve closed
7/19/2012	3:15:41 PM	Bubbler valve closed
7/19/2012	3:15:41 PM	Helium valve opened
7/19/2012	3:15:41 PM	Main Vac valve opened
7/19/2012	3:15:41 PM	Helium MFC set to  20.000000
7/19/2012	3:15:41 PM	H2 MFC set to  0.000000
7/19/2012	3:15:41 PM	BCl3 MFC set to  0.000000
7/19/2012	3:15:41 PM	PH3 MFC set to  0.000000
7/19/2012	3:15:41 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:15:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:15:41 PM	Tube furnace set to 0
7/19/2012	3:16:11 PM	Helium valve closed
7/19/2012	3:16:11 PM	H2 valve closed
7/19/2012	3:16:11 PM	BCl3 valve closed
7/19/2012	3:16:11 PM	PH3 valve closed
7/19/2012	3:16:11 PM	SiCl4 pre valve closed
7/19/2012	3:16:11 PM	SiCl4 post valve closed
7/19/2012	3:16:11 PM	Bypass valve closed
7/19/2012	3:16:11 PM	Bubbler valve closed
7/19/2012	3:16:11 PM	Main Vac valve opened
7/19/2012	3:16:11 PM	Helium MFC set to  0.000000
7/19/2012	3:16:11 PM	H2 MFC set to  0.000000
7/19/2012	3:16:11 PM	BCl3 MFC set to  0.000000
7/19/2012	3:16:11 PM	PH3 MFC set to  0.000000
7/19/2012	3:16:11 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:16:11 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:16:11 PM	Tube furnace set to 0
7/19/2012	3:16:41 PM	H2 valve closed
7/19/2012	3:16:41 PM	BCl3 valve closed
7/19/2012	3:16:41 PM	PH3 valve closed
7/19/2012	3:16:41 PM	SiCl4 pre valve closed
7/19/2012	3:16:41 PM	SiCl4 post valve closed
7/19/2012	3:16:41 PM	Bypass valve closed
7/19/2012	3:16:41 PM	Bubbler valve closed
7/19/2012	3:16:41 PM	Helium valve opened
7/19/2012	3:16:41 PM	Main Vac valve opened
7/19/2012	3:16:41 PM	Helium MFC set to  20.000000
7/19/2012	3:16:41 PM	H2 MFC set to  0.000000
7/19/2012	3:16:41 PM	BCl3 MFC set to  0.000000
7/19/2012	3:16:41 PM	PH3 MFC set to  0.000000
7/19/2012	3:16:41 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:16:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:16:42 PM	Tube furnace set to 0
7/19/2012	3:17:12 PM	Helium valve closed
7/19/2012	3:17:12 PM	H2 valve closed
7/19/2012	3:17:12 PM	BCl3 valve closed
7/19/2012	3:17:12 PM	PH3 valve closed
7/19/2012	3:17:12 PM	SiCl4 pre valve closed
7/19/2012	3:17:12 PM	SiCl4 post valve closed
7/19/2012	3:17:12 PM	Bypass valve closed
7/19/2012	3:17:12 PM	Bubbler valve closed
7/19/2012	3:17:12 PM	Main Vac valve opened
7/19/2012	3:17:12 PM	Helium MFC set to  0.000000
7/19/2012	3:17:12 PM	H2 MFC set to  0.000000
7/19/2012	3:17:12 PM	BCl3 MFC set to  0.000000
7/19/2012	3:17:12 PM	PH3 MFC set to  0.000000
7/19/2012	3:17:12 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:17:12 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:17:12 PM	Tube furnace set to 0
7/19/2012	3:17:42 PM	H2 valve closed
7/19/2012	3:17:42 PM	BCl3 valve closed
7/19/2012	3:17:42 PM	PH3 valve closed
7/19/2012	3:17:42 PM	SiCl4 pre valve closed
7/19/2012	3:17:42 PM	SiCl4 post valve closed
7/19/2012	3:17:42 PM	Bypass valve closed
7/19/2012	3:17:42 PM	Bubbler valve closed
7/19/2012	3:17:42 PM	Helium valve opened
7/19/2012	3:17:42 PM	Main Vac valve opened
7/19/2012	3:17:42 PM	Helium MFC set to  20.000000
7/19/2012	3:17:42 PM	H2 MFC set to  0.000000
7/19/2012	3:17:42 PM	BCl3 MFC set to  0.000000
7/19/2012	3:17:42 PM	PH3 MFC set to  0.000000
7/19/2012	3:17:42 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:17:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:17:42 PM	Tube furnace set to 0
7/19/2012	3:18:12 PM	Helium valve closed
7/19/2012	3:18:12 PM	H2 valve closed
7/19/2012	3:18:12 PM	BCl3 valve closed
7/19/2012	3:18:12 PM	PH3 valve closed
7/19/2012	3:18:12 PM	SiCl4 pre valve closed
7/19/2012	3:18:12 PM	SiCl4 post valve closed
7/19/2012	3:18:12 PM	Bypass valve closed
7/19/2012	3:18:12 PM	Bubbler valve closed
7/19/2012	3:18:12 PM	Main Vac valve opened
7/19/2012	3:18:12 PM	Helium MFC set to  0.000000
7/19/2012	3:18:12 PM	H2 MFC set to  0.000000
7/19/2012	3:18:12 PM	BCl3 MFC set to  0.000000
7/19/2012	3:18:12 PM	PH3 MFC set to  0.000000
7/19/2012	3:18:12 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:18:12 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:18:12 PM	Tube furnace set to 0
7/19/2012	3:18:42 PM	H2 valve closed
7/19/2012	3:18:42 PM	BCl3 valve closed
7/19/2012	3:18:42 PM	PH3 valve closed
7/19/2012	3:18:42 PM	SiCl4 pre valve closed
7/19/2012	3:18:42 PM	SiCl4 post valve closed
7/19/2012	3:18:42 PM	Bypass valve closed
7/19/2012	3:18:42 PM	Bubbler valve closed
7/19/2012	3:18:42 PM	Helium valve opened
7/19/2012	3:18:42 PM	Main Vac valve opened
7/19/2012	3:18:42 PM	Helium MFC set to  20.000000
7/19/2012	3:18:42 PM	H2 MFC set to  0.000000
7/19/2012	3:18:42 PM	BCl3 MFC set to  0.000000
7/19/2012	3:18:42 PM	PH3 MFC set to  0.000000
7/19/2012	3:18:42 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:18:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:18:43 PM	Tube furnace set to 0
7/19/2012	3:19:13 PM	Helium valve closed
7/19/2012	3:19:13 PM	H2 valve closed
7/19/2012	3:19:13 PM	BCl3 valve closed
7/19/2012	3:19:13 PM	PH3 valve closed
7/19/2012	3:19:13 PM	SiCl4 pre valve closed
7/19/2012	3:19:13 PM	SiCl4 post valve closed
7/19/2012	3:19:13 PM	Bypass valve closed
7/19/2012	3:19:13 PM	Bubbler valve closed
7/19/2012	3:19:13 PM	Main Vac valve opened
7/19/2012	3:19:13 PM	Helium MFC set to  0.000000
7/19/2012	3:19:13 PM	H2 MFC set to  0.000000
7/19/2012	3:19:13 PM	BCl3 MFC set to  0.000000
7/19/2012	3:19:13 PM	PH3 MFC set to  0.000000
7/19/2012	3:19:13 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:19:13 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:19:13 PM	Tube furnace set to 0
7/19/2012	3:19:43 PM	H2 valve closed
7/19/2012	3:19:43 PM	BCl3 valve closed
7/19/2012	3:19:43 PM	PH3 valve closed
7/19/2012	3:19:43 PM	SiCl4 pre valve closed
7/19/2012	3:19:43 PM	SiCl4 post valve closed
7/19/2012	3:19:43 PM	Bypass valve closed
7/19/2012	3:19:43 PM	Bubbler valve closed
7/19/2012	3:19:43 PM	Helium valve opened
7/19/2012	3:19:43 PM	Main Vac valve opened
7/19/2012	3:19:43 PM	Helium MFC set to  20.000000
7/19/2012	3:19:43 PM	H2 MFC set to  0.000000
7/19/2012	3:19:43 PM	BCl3 MFC set to  0.000000
7/19/2012	3:19:43 PM	PH3 MFC set to  0.000000
7/19/2012	3:19:43 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:19:43 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:19:43 PM	Tube furnace set to 0
7/19/2012	3:20:13 PM	Helium valve closed
7/19/2012	3:20:13 PM	H2 valve closed
7/19/2012	3:20:13 PM	BCl3 valve closed
7/19/2012	3:20:13 PM	PH3 valve closed
7/19/2012	3:20:13 PM	SiCl4 pre valve closed
7/19/2012	3:20:13 PM	SiCl4 post valve closed
7/19/2012	3:20:13 PM	Bypass valve closed
7/19/2012	3:20:13 PM	Bubbler valve closed
7/19/2012	3:20:13 PM	Main Vac valve opened
7/19/2012	3:20:13 PM	Helium MFC set to  0.000000
7/19/2012	3:20:13 PM	H2 MFC set to  0.000000
7/19/2012	3:20:13 PM	BCl3 MFC set to  0.000000
7/19/2012	3:20:13 PM	PH3 MFC set to  0.000000
7/19/2012	3:20:13 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:20:13 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:20:13 PM	Tube furnace set to 0
7/19/2012	3:20:43 PM	H2 valve closed
7/19/2012	3:20:43 PM	BCl3 valve closed
7/19/2012	3:20:43 PM	PH3 valve closed
7/19/2012	3:20:43 PM	SiCl4 pre valve closed
7/19/2012	3:20:43 PM	SiCl4 post valve closed
7/19/2012	3:20:43 PM	Bypass valve closed
7/19/2012	3:20:43 PM	Bubbler valve closed
7/19/2012	3:20:43 PM	Helium valve opened
7/19/2012	3:20:43 PM	Main Vac valve opened
7/19/2012	3:20:43 PM	Helium MFC set to  20.000000
7/19/2012	3:20:43 PM	H2 MFC set to  0.000000
7/19/2012	3:20:43 PM	BCl3 MFC set to  0.000000
7/19/2012	3:20:43 PM	PH3 MFC set to  0.000000
7/19/2012	3:20:43 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:20:43 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:20:43 PM	Tube furnace set to 0
7/19/2012	3:21:13 PM	Helium valve closed
7/19/2012	3:21:14 PM	H2 valve closed
7/19/2012	3:21:14 PM	BCl3 valve closed
7/19/2012	3:21:14 PM	PH3 valve closed
7/19/2012	3:21:14 PM	SiCl4 pre valve closed
7/19/2012	3:21:14 PM	SiCl4 post valve closed
7/19/2012	3:21:14 PM	Bypass valve closed
7/19/2012	3:21:14 PM	Bubbler valve closed
7/19/2012	3:21:14 PM	Main Vac valve opened
7/19/2012	3:21:14 PM	Helium MFC set to  0.000000
7/19/2012	3:21:14 PM	H2 MFC set to  0.000000
7/19/2012	3:21:14 PM	BCl3 MFC set to  0.000000
7/19/2012	3:21:14 PM	PH3 MFC set to  0.000000
7/19/2012	3:21:14 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:21:14 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:21:14 PM	Tube furnace set to 0
7/19/2012	3:21:44 PM	H2 valve closed
7/19/2012	3:21:44 PM	BCl3 valve closed
7/19/2012	3:21:44 PM	PH3 valve closed
7/19/2012	3:21:44 PM	SiCl4 pre valve closed
7/19/2012	3:21:44 PM	SiCl4 post valve closed
7/19/2012	3:21:44 PM	Bypass valve closed
7/19/2012	3:21:44 PM	Bubbler valve closed
7/19/2012	3:21:44 PM	Helium valve opened
7/19/2012	3:21:44 PM	Main Vac valve opened
7/19/2012	3:21:44 PM	Helium MFC set to  20.000000
7/19/2012	3:21:44 PM	H2 MFC set to  0.000000
7/19/2012	3:21:44 PM	BCl3 MFC set to  0.000000
7/19/2012	3:21:44 PM	PH3 MFC set to  0.000000
7/19/2012	3:21:44 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:21:44 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:21:44 PM	Tube furnace set to 0
7/19/2012	3:22:14 PM	Helium valve closed
7/19/2012	3:22:14 PM	H2 valve closed
7/19/2012	3:22:14 PM	BCl3 valve closed
7/19/2012	3:22:14 PM	PH3 valve closed
7/19/2012	3:22:14 PM	SiCl4 pre valve closed
7/19/2012	3:22:14 PM	SiCl4 post valve closed
7/19/2012	3:22:14 PM	Bypass valve closed
7/19/2012	3:22:14 PM	Bubbler valve closed
7/19/2012	3:22:14 PM	Main Vac valve opened
7/19/2012	3:22:14 PM	Helium MFC set to  0.000000
7/19/2012	3:22:14 PM	H2 MFC set to  0.000000
7/19/2012	3:22:14 PM	BCl3 MFC set to  0.000000
7/19/2012	3:22:14 PM	PH3 MFC set to  0.000000
7/19/2012	3:22:14 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:22:14 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:22:14 PM	Tube furnace set to 0
7/19/2012	3:22:15 PM	Run finished at 3:22 PM
7/19/2012	3:22:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2012	3:49:49 PM	Main Vac valve closed
7/19/2012	3:50:03 PM	Main Vac valve opened
7/19/2012	3:51:01 PM	Recipe started at 3:50 PM
7/19/2012	3:51:01 PM	Helium valve closed
7/19/2012	3:51:01 PM	H2 valve closed
7/19/2012	3:51:01 PM	BCl3 valve closed
7/19/2012	3:51:01 PM	PH3 valve closed
7/19/2012	3:51:01 PM	SiCl4 pre valve closed
7/19/2012	3:51:01 PM	SiCl4 post valve closed
7/19/2012	3:51:01 PM	Main Vac valve closed
7/19/2012	3:51:01 PM	Bypass valve closed
7/19/2012	3:51:01 PM	Bubbler valve closed
7/19/2012	3:51:01 PM	Helium MFC set to  0.000000
7/19/2012	3:51:01 PM	H2 MFC set to  0.000000
7/19/2012	3:51:01 PM	BCl3 MFC set to  0.000000
7/19/2012	3:51:01 PM	PH3 MFC set to  0.000000
7/19/2012	3:51:01 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:51:01 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:51:02 PM	Tube furnace set to 0
7/19/2012	3:51:05 PM	Helium valve closed
7/19/2012	3:51:05 PM	BCl3 valve closed
7/19/2012	3:51:05 PM	PH3 valve closed
7/19/2012	3:51:05 PM	SiCl4 pre valve closed
7/19/2012	3:51:05 PM	SiCl4 post valve closed
7/19/2012	3:51:05 PM	Main Vac valve closed
7/19/2012	3:51:05 PM	Bypass valve closed
7/19/2012	3:51:05 PM	Bubbler valve closed
7/19/2012	3:51:05 PM	H2 valve opened
7/19/2012	3:51:05 PM	Helium MFC set to  0.000000
7/19/2012	3:51:05 PM	H2 MFC set to  500.000000
7/19/2012	3:51:05 PM	BCl3 MFC set to  0.000000
7/19/2012	3:51:05 PM	PH3 MFC set to  0.000000
7/19/2012	3:51:05 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:51:05 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:51:05 PM	Tube furnace set to 50
7/19/2012	3:52:18 PM	Helium valve closed
7/19/2012	3:52:18 PM	BCl3 valve closed
7/19/2012	3:52:18 PM	PH3 valve closed
7/19/2012	3:52:18 PM	SiCl4 pre valve closed
7/19/2012	3:52:18 PM	SiCl4 post valve closed
7/19/2012	3:52:18 PM	Main Vac valve closed
7/19/2012	3:52:18 PM	Bypass valve closed
7/19/2012	3:52:18 PM	H2 valve opened
7/19/2012	3:52:18 PM	Bubbler valve opened
7/19/2012	3:52:18 PM	Helium MFC set to  0.000000
7/19/2012	3:52:18 PM	H2 MFC set to  500.000000
7/19/2012	3:52:18 PM	BCl3 MFC set to  0.000000
7/19/2012	3:52:18 PM	PH3 MFC set to  0.000000
7/19/2012	3:52:18 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:52:18 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:52:18 PM	Tube furnace set to 50
7/19/2012	3:52:20 PM	Helium valve closed
7/19/2012	3:52:20 PM	BCl3 valve closed
7/19/2012	3:52:20 PM	PH3 valve closed
7/19/2012	3:52:20 PM	SiCl4 pre valve closed
7/19/2012	3:52:20 PM	SiCl4 post valve closed
7/19/2012	3:52:20 PM	Main Vac valve closed
7/19/2012	3:52:20 PM	Bypass valve closed
7/19/2012	3:52:20 PM	H2 valve opened
7/19/2012	3:52:20 PM	Bubbler valve opened
7/19/2012	3:52:20 PM	Helium MFC set to  0.000000
7/19/2012	3:52:20 PM	H2 MFC set to  500.000000
7/19/2012	3:52:20 PM	BCl3 MFC set to  0.000000
7/19/2012	3:52:20 PM	PH3 MFC set to  0.000000
7/19/2012	3:52:20 PM	SiCl4 MFC set to  0.000000
7/19/2012	3:52:20 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	3:52:20 PM	Tube furnace set to 1000
7/19/2012	4:12:20 PM	Helium valve closed
7/19/2012	4:12:20 PM	BCl3 valve closed
7/19/2012	4:12:20 PM	PH3 valve closed
7/19/2012	4:12:20 PM	Main Vac valve closed
7/19/2012	4:12:20 PM	Bypass valve closed
7/19/2012	4:12:20 PM	H2 valve opened
7/19/2012	4:12:20 PM	SiCl4 pre valve opened
7/19/2012	4:12:20 PM	SiCl4 post valve opened
7/19/2012	4:12:20 PM	Bubbler valve opened
7/19/2012	4:12:20 PM	Helium MFC set to  0.000000
7/19/2012	4:12:20 PM	H2 MFC set to  500.000000
7/19/2012	4:12:20 PM	BCl3 MFC set to  0.000000
7/19/2012	4:12:20 PM	PH3 MFC set to  0.000000
7/19/2012	4:12:20 PM	SiCl4 MFC set to  50.000000
7/19/2012	4:12:20 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	4:12:20 PM	Tube furnace set to 1000
7/19/2012	4:20:50 PM	Helium valve closed
7/19/2012	4:20:50 PM	BCl3 valve closed
7/19/2012	4:20:50 PM	PH3 valve closed
7/19/2012	4:20:50 PM	SiCl4 pre valve closed
7/19/2012	4:20:50 PM	SiCl4 post valve closed
7/19/2012	4:20:50 PM	Main Vac valve closed
7/19/2012	4:20:50 PM	Bypass valve closed
7/19/2012	4:20:50 PM	H2 valve opened
7/19/2012	4:20:50 PM	Bubbler valve opened
7/19/2012	4:20:50 PM	Helium MFC set to  0.000000
7/19/2012	4:20:50 PM	H2 MFC set to  500.000000
7/19/2012	4:20:50 PM	BCl3 MFC set to  0.000000
7/19/2012	4:20:50 PM	PH3 MFC set to  0.000000
7/19/2012	4:20:50 PM	SiCl4 MFC set to  0.000000
7/19/2012	4:20:50 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	4:20:50 PM	Tube furnace set to 750
7/19/2012	4:30:50 PM	H2 valve closed
7/19/2012	4:30:50 PM	BCl3 valve closed
7/19/2012	4:30:50 PM	PH3 valve closed
7/19/2012	4:30:50 PM	SiCl4 pre valve closed
7/19/2012	4:30:50 PM	SiCl4 post valve closed
7/19/2012	4:30:50 PM	Main Vac valve closed
7/19/2012	4:30:50 PM	Bypass valve closed
7/19/2012	4:30:50 PM	Helium valve opened
7/19/2012	4:30:50 PM	Bubbler valve opened
7/19/2012	4:30:50 PM	Helium MFC set to  400.000000
7/19/2012	4:30:50 PM	H2 MFC set to  0.000000
7/19/2012	4:30:50 PM	BCl3 MFC set to  0.000000
7/19/2012	4:30:50 PM	PH3 MFC set to  0.000000
7/19/2012	4:30:50 PM	SiCl4 MFC set to  0.000000
7/19/2012	4:30:50 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	4:30:50 PM	Tube furnace set to 0
7/19/2012	4:41:48 PM	Run aborted at 4:41 PM
7/19/2012	4:41:48 PM	Helium valve closed
7/19/2012	4:41:48 PM	H2 valve closed
7/19/2012	4:41:48 PM	BCl3 valve closed
7/19/2012	4:41:48 PM	PH3 valve closed
7/19/2012	4:41:48 PM	SiCl4 pre valve closed
7/19/2012	4:41:48 PM	SiCl4 post valve closed
7/19/2012	4:41:48 PM	Bypass valve closed
7/19/2012	4:41:48 PM	Main Vac valve closed
7/19/2012	4:41:48 PM	Bubbler valve closed
7/19/2012	4:41:48 PM	Helium MFC set to  0.000000
7/19/2012	4:41:48 PM	H2 MFC set to  0.000000
7/19/2012	4:41:48 PM	BCl3 MFC set to  0.000000
7/19/2012	4:41:48 PM	PH3 MFC set to  0.000000
7/19/2012	4:41:48 PM	SiCl4 MFC set to  0.000000
7/19/2012	4:41:49 PM	Tube furnace set to 0
7/19/2012	4:41:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2012	4:41:51 PM	Recipe started at 4:41 PM
7/19/2012	4:41:51 PM	Helium valve closed
7/19/2012	4:41:51 PM	H2 valve closed
7/19/2012	4:41:51 PM	BCl3 valve closed
7/19/2012	4:41:51 PM	PH3 valve closed
7/19/2012	4:41:51 PM	SiCl4 pre valve closed
7/19/2012	4:41:51 PM	SiCl4 post valve closed
7/19/2012	4:41:51 PM	Main Vac valve closed
7/19/2012	4:41:51 PM	Bypass valve closed
7/19/2012	4:41:51 PM	Bubbler valve closed
7/19/2012	4:41:51 PM	Helium MFC set to  0.000000
7/19/2012	4:41:51 PM	H2 MFC set to  0.000000
7/19/2012	4:41:51 PM	BCl3 MFC set to  0.000000
7/19/2012	4:41:51 PM	PH3 MFC set to  0.000000
7/19/2012	4:41:51 PM	SiCl4 MFC set to  0.000000
7/19/2012	4:41:51 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	4:41:51 PM	Tube furnace set to 0
7/19/2012	4:41:54 PM	H2 valve closed
7/19/2012	4:41:54 PM	BCl3 valve closed
7/19/2012	4:41:54 PM	PH3 valve closed
7/19/2012	4:41:54 PM	SiCl4 pre valve closed
7/19/2012	4:41:54 PM	SiCl4 post valve closed
7/19/2012	4:41:54 PM	Main Vac valve closed
7/19/2012	4:41:54 PM	Bypass valve closed
7/19/2012	4:41:54 PM	Bubbler valve closed
7/19/2012	4:41:54 PM	Helium valve opened
7/19/2012	4:41:54 PM	Helium MFC set to  500.000000
7/19/2012	4:41:54 PM	H2 MFC set to  0.000000
7/19/2012	4:41:54 PM	BCl3 MFC set to  0.000000
7/19/2012	4:41:54 PM	PH3 MFC set to  0.000000
7/19/2012	4:41:54 PM	SiCl4 MFC set to  0.000000
7/19/2012	4:41:54 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	4:41:54 PM	Tube furnace set to 0
7/19/2012	4:41:55 PM	Helium valve closed
7/19/2012	4:41:55 PM	H2 valve closed
7/19/2012	4:41:55 PM	BCl3 valve closed
7/19/2012	4:41:55 PM	PH3 valve closed
7/19/2012	4:41:55 PM	SiCl4 pre valve closed
7/19/2012	4:41:55 PM	SiCl4 post valve closed
7/19/2012	4:41:55 PM	Main Vac valve closed
7/19/2012	4:41:55 PM	Bypass valve closed
7/19/2012	4:41:55 PM	Bubbler valve closed
7/19/2012	4:41:55 PM	Helium MFC set to  0.000000
7/19/2012	4:41:55 PM	H2 MFC set to  0.000000
7/19/2012	4:41:55 PM	BCl3 MFC set to  0.000000
7/19/2012	4:41:55 PM	PH3 MFC set to  0.000000
7/19/2012	4:41:55 PM	SiCl4 MFC set to  0.000000
7/19/2012	4:41:55 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	4:41:55 PM	Tube furnace set to 0
7/19/2012	4:41:56 PM	Run finished at 4:41 PM
7/19/2012	4:41:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2012	4:49:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2012	4:49:19 PM	Recipe started at 4:49 PM
7/19/2012	4:49:19 PM	Helium valve closed
7/19/2012	4:49:19 PM	H2 valve closed
7/19/2012	4:49:19 PM	BCl3 valve closed
7/19/2012	4:49:19 PM	PH3 valve closed
7/19/2012	4:49:19 PM	SiCl4 pre valve closed
7/19/2012	4:49:19 PM	SiCl4 post valve closed
7/19/2012	4:49:19 PM	Main Vac valve closed
7/19/2012	4:49:19 PM	Bubbler valve closed
7/19/2012	4:49:19 PM	Bypass valve opened
7/19/2012	4:49:19 PM	Helium MFC set to  0.000000
7/19/2012	4:49:19 PM	H2 MFC set to  0.000000
7/19/2012	4:49:19 PM	BCl3 MFC set to  0.000000
7/19/2012	4:49:19 PM	PH3 MFC set to  0.000000
7/19/2012	4:49:19 PM	SiCl4 MFC set to  0.000000
7/19/2012	4:49:19 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	4:49:19 PM	Tube furnace set to 0
7/19/2012	4:50:34 PM	Helium valve closed
7/19/2012	4:50:34 PM	H2 valve closed
7/19/2012	4:50:34 PM	BCl3 valve closed
7/19/2012	4:50:34 PM	PH3 valve closed
7/19/2012	4:50:34 PM	SiCl4 pre valve closed
7/19/2012	4:50:34 PM	SiCl4 post valve closed
7/19/2012	4:50:34 PM	Main Vac valve closed
7/19/2012	4:50:34 PM	Bubbler valve closed
7/19/2012	4:50:34 PM	Bypass valve opened
7/19/2012	4:50:34 PM	Helium MFC set to  0.000000
7/19/2012	4:50:34 PM	H2 MFC set to  0.000000
7/19/2012	4:50:34 PM	BCl3 MFC set to  0.000000
7/19/2012	4:50:34 PM	PH3 MFC set to  0.000000
7/19/2012	4:50:34 PM	SiCl4 MFC set to  0.000000
7/19/2012	4:50:34 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	4:50:34 PM	Tube furnace set to 0
7/19/2012	4:51:34 PM	Helium valve closed
7/19/2012	4:51:34 PM	H2 valve closed
7/19/2012	4:51:34 PM	BCl3 valve closed
7/19/2012	4:51:34 PM	PH3 valve closed
7/19/2012	4:51:34 PM	SiCl4 pre valve closed
7/19/2012	4:51:34 PM	SiCl4 post valve closed
7/19/2012	4:51:34 PM	Bypass valve closed
7/19/2012	4:51:34 PM	Bubbler valve closed
7/19/2012	4:51:34 PM	Main Vac valve opened
7/19/2012	4:51:34 PM	Helium MFC set to  0.000000
7/19/2012	4:51:34 PM	H2 MFC set to  0.000000
7/19/2012	4:51:34 PM	BCl3 MFC set to  0.000000
7/19/2012	4:51:34 PM	PH3 MFC set to  0.000000
7/19/2012	4:51:34 PM	SiCl4 MFC set to  0.000000
7/19/2012	4:51:34 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	4:51:34 PM	Tube furnace set to 0
7/19/2012	4:51:35 PM	Run finished at 4:51 PM
7/19/2012	4:51:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2012	5:24:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2012	5:24:24 PM	Recipe started at 5:24 PM
7/19/2012	5:24:24 PM	Helium valve closed
7/19/2012	5:24:24 PM	H2 valve closed
7/19/2012	5:24:24 PM	BCl3 valve closed
7/19/2012	5:24:24 PM	PH3 valve closed
7/19/2012	5:24:24 PM	SiCl4 pre valve closed
7/19/2012	5:24:24 PM	SiCl4 post valve closed
7/19/2012	5:24:24 PM	Main Vac valve closed
7/19/2012	5:24:24 PM	Bubbler valve closed
7/19/2012	5:24:24 PM	Bypass valve opened
7/19/2012	5:24:24 PM	Helium MFC set to  0.000000
7/19/2012	5:24:24 PM	H2 MFC set to  0.000000
7/19/2012	5:24:24 PM	BCl3 MFC set to  0.000000
7/19/2012	5:24:24 PM	PH3 MFC set to  0.000000
7/19/2012	5:24:24 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:24:24 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:24:24 PM	Tube furnace set to 0
7/19/2012	5:24:24 PM	Helium valve closed
7/19/2012	5:24:24 PM	H2 valve closed
7/19/2012	5:24:24 PM	BCl3 valve closed
7/19/2012	5:24:24 PM	PH3 valve closed
7/19/2012	5:24:24 PM	SiCl4 pre valve closed
7/19/2012	5:24:24 PM	SiCl4 post valve closed
7/19/2012	5:24:24 PM	Main Vac valve closed
7/19/2012	5:24:24 PM	Bubbler valve closed
7/19/2012	5:24:24 PM	Bypass valve opened
7/19/2012	5:24:24 PM	Helium MFC set to  0.000000
7/19/2012	5:24:24 PM	H2 MFC set to  0.000000
7/19/2012	5:24:24 PM	BCl3 MFC set to  0.000000
7/19/2012	5:24:24 PM	PH3 MFC set to  0.000000
7/19/2012	5:24:24 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:24:24 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:24:25 PM	Tube furnace set to 0
7/19/2012	5:24:55 PM	Helium valve closed
7/19/2012	5:24:55 PM	H2 valve closed
7/19/2012	5:24:55 PM	BCl3 valve closed
7/19/2012	5:24:55 PM	PH3 valve closed
7/19/2012	5:24:55 PM	SiCl4 pre valve closed
7/19/2012	5:24:55 PM	SiCl4 post valve closed
7/19/2012	5:24:55 PM	Bypass valve closed
7/19/2012	5:24:55 PM	Bubbler valve closed
7/19/2012	5:24:55 PM	Main Vac valve opened
7/19/2012	5:24:55 PM	Helium MFC set to  0.000000
7/19/2012	5:24:55 PM	H2 MFC set to  0.000000
7/19/2012	5:24:55 PM	BCl3 MFC set to  0.000000
7/19/2012	5:24:55 PM	PH3 MFC set to  0.000000
7/19/2012	5:24:55 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:24:55 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:24:55 PM	Tube furnace set to 0
7/19/2012	5:25:25 PM	H2 valve closed
7/19/2012	5:25:25 PM	BCl3 valve closed
7/19/2012	5:25:25 PM	PH3 valve closed
7/19/2012	5:25:25 PM	SiCl4 pre valve closed
7/19/2012	5:25:25 PM	SiCl4 post valve closed
7/19/2012	5:25:25 PM	Bypass valve closed
7/19/2012	5:25:25 PM	Bubbler valve closed
7/19/2012	5:25:25 PM	Helium valve opened
7/19/2012	5:25:25 PM	Main Vac valve opened
7/19/2012	5:25:25 PM	Helium MFC set to  20.000000
7/19/2012	5:25:25 PM	H2 MFC set to  0.000000
7/19/2012	5:25:25 PM	BCl3 MFC set to  0.000000
7/19/2012	5:25:25 PM	PH3 MFC set to  0.000000
7/19/2012	5:25:25 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:25:25 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:25:25 PM	Tube furnace set to 0
7/19/2012	5:25:55 PM	Helium valve closed
7/19/2012	5:25:55 PM	H2 valve closed
7/19/2012	5:25:55 PM	BCl3 valve closed
7/19/2012	5:25:55 PM	PH3 valve closed
7/19/2012	5:25:55 PM	SiCl4 pre valve closed
7/19/2012	5:25:55 PM	SiCl4 post valve closed
7/19/2012	5:25:55 PM	Bypass valve closed
7/19/2012	5:25:55 PM	Bubbler valve closed
7/19/2012	5:25:55 PM	Main Vac valve opened
7/19/2012	5:25:55 PM	Helium MFC set to  0.000000
7/19/2012	5:25:55 PM	H2 MFC set to  0.000000
7/19/2012	5:25:55 PM	BCl3 MFC set to  0.000000
7/19/2012	5:25:55 PM	PH3 MFC set to  0.000000
7/19/2012	5:25:55 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:25:55 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:25:55 PM	Tube furnace set to 0
7/19/2012	5:26:25 PM	H2 valve closed
7/19/2012	5:26:25 PM	BCl3 valve closed
7/19/2012	5:26:25 PM	PH3 valve closed
7/19/2012	5:26:25 PM	SiCl4 pre valve closed
7/19/2012	5:26:25 PM	SiCl4 post valve closed
7/19/2012	5:26:25 PM	Bypass valve closed
7/19/2012	5:26:25 PM	Bubbler valve closed
7/19/2012	5:26:25 PM	Helium valve opened
7/19/2012	5:26:25 PM	Main Vac valve opened
7/19/2012	5:26:25 PM	Helium MFC set to  20.000000
7/19/2012	5:26:25 PM	H2 MFC set to  0.000000
7/19/2012	5:26:25 PM	BCl3 MFC set to  0.000000
7/19/2012	5:26:25 PM	PH3 MFC set to  0.000000
7/19/2012	5:26:25 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:26:25 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:26:26 PM	Tube furnace set to 0
7/19/2012	5:26:56 PM	Helium valve closed
7/19/2012	5:26:56 PM	H2 valve closed
7/19/2012	5:26:56 PM	BCl3 valve closed
7/19/2012	5:26:56 PM	PH3 valve closed
7/19/2012	5:26:56 PM	SiCl4 pre valve closed
7/19/2012	5:26:56 PM	SiCl4 post valve closed
7/19/2012	5:26:56 PM	Bypass valve closed
7/19/2012	5:26:56 PM	Bubbler valve closed
7/19/2012	5:26:56 PM	Main Vac valve opened
7/19/2012	5:26:56 PM	Helium MFC set to  0.000000
7/19/2012	5:26:56 PM	H2 MFC set to  0.000000
7/19/2012	5:26:56 PM	BCl3 MFC set to  0.000000
7/19/2012	5:26:56 PM	PH3 MFC set to  0.000000
7/19/2012	5:26:56 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:26:56 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:26:56 PM	Tube furnace set to 0
7/19/2012	5:27:26 PM	H2 valve closed
7/19/2012	5:27:26 PM	BCl3 valve closed
7/19/2012	5:27:26 PM	PH3 valve closed
7/19/2012	5:27:26 PM	SiCl4 pre valve closed
7/19/2012	5:27:26 PM	SiCl4 post valve closed
7/19/2012	5:27:26 PM	Bypass valve closed
7/19/2012	5:27:26 PM	Bubbler valve closed
7/19/2012	5:27:26 PM	Helium valve opened
7/19/2012	5:27:26 PM	Main Vac valve opened
7/19/2012	5:27:26 PM	Helium MFC set to  20.000000
7/19/2012	5:27:26 PM	H2 MFC set to  0.000000
7/19/2012	5:27:26 PM	BCl3 MFC set to  0.000000
7/19/2012	5:27:26 PM	PH3 MFC set to  0.000000
7/19/2012	5:27:26 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:27:26 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:27:26 PM	Tube furnace set to 0
7/19/2012	5:27:56 PM	Helium valve closed
7/19/2012	5:27:56 PM	H2 valve closed
7/19/2012	5:27:56 PM	BCl3 valve closed
7/19/2012	5:27:56 PM	PH3 valve closed
7/19/2012	5:27:56 PM	SiCl4 pre valve closed
7/19/2012	5:27:56 PM	SiCl4 post valve closed
7/19/2012	5:27:56 PM	Bypass valve closed
7/19/2012	5:27:56 PM	Bubbler valve closed
7/19/2012	5:27:56 PM	Main Vac valve opened
7/19/2012	5:27:56 PM	Helium MFC set to  0.000000
7/19/2012	5:27:56 PM	H2 MFC set to  0.000000
7/19/2012	5:27:56 PM	BCl3 MFC set to  0.000000
7/19/2012	5:27:56 PM	PH3 MFC set to  0.000000
7/19/2012	5:27:56 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:27:56 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:27:56 PM	Tube furnace set to 0
7/19/2012	5:28:26 PM	H2 valve closed
7/19/2012	5:28:26 PM	BCl3 valve closed
7/19/2012	5:28:26 PM	PH3 valve closed
7/19/2012	5:28:26 PM	SiCl4 pre valve closed
7/19/2012	5:28:26 PM	SiCl4 post valve closed
7/19/2012	5:28:26 PM	Bypass valve closed
7/19/2012	5:28:26 PM	Bubbler valve closed
7/19/2012	5:28:26 PM	Helium valve opened
7/19/2012	5:28:26 PM	Main Vac valve opened
7/19/2012	5:28:26 PM	Helium MFC set to  20.000000
7/19/2012	5:28:26 PM	H2 MFC set to  0.000000
7/19/2012	5:28:26 PM	BCl3 MFC set to  0.000000
7/19/2012	5:28:26 PM	PH3 MFC set to  0.000000
7/19/2012	5:28:26 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:28:26 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:28:26 PM	Tube furnace set to 0
7/19/2012	5:28:57 PM	Helium valve closed
7/19/2012	5:28:57 PM	H2 valve closed
7/19/2012	5:28:57 PM	BCl3 valve closed
7/19/2012	5:28:57 PM	PH3 valve closed
7/19/2012	5:28:57 PM	SiCl4 pre valve closed
7/19/2012	5:28:57 PM	SiCl4 post valve closed
7/19/2012	5:28:57 PM	Bypass valve closed
7/19/2012	5:28:57 PM	Bubbler valve closed
7/19/2012	5:28:57 PM	Main Vac valve opened
7/19/2012	5:28:57 PM	Helium MFC set to  0.000000
7/19/2012	5:28:57 PM	H2 MFC set to  0.000000
7/19/2012	5:28:57 PM	BCl3 MFC set to  0.000000
7/19/2012	5:28:57 PM	PH3 MFC set to  0.000000
7/19/2012	5:28:57 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:28:57 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:28:57 PM	Tube furnace set to 0
7/19/2012	5:29:27 PM	H2 valve closed
7/19/2012	5:29:27 PM	BCl3 valve closed
7/19/2012	5:29:27 PM	PH3 valve closed
7/19/2012	5:29:27 PM	SiCl4 pre valve closed
7/19/2012	5:29:27 PM	SiCl4 post valve closed
7/19/2012	5:29:27 PM	Bypass valve closed
7/19/2012	5:29:27 PM	Bubbler valve closed
7/19/2012	5:29:27 PM	Helium valve opened
7/19/2012	5:29:27 PM	Main Vac valve opened
7/19/2012	5:29:27 PM	Helium MFC set to  20.000000
7/19/2012	5:29:27 PM	H2 MFC set to  0.000000
7/19/2012	5:29:27 PM	BCl3 MFC set to  0.000000
7/19/2012	5:29:27 PM	PH3 MFC set to  0.000000
7/19/2012	5:29:27 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:29:27 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:29:27 PM	Tube furnace set to 0
7/19/2012	5:29:57 PM	Helium valve closed
7/19/2012	5:29:57 PM	H2 valve closed
7/19/2012	5:29:57 PM	BCl3 valve closed
7/19/2012	5:29:57 PM	PH3 valve closed
7/19/2012	5:29:57 PM	SiCl4 pre valve closed
7/19/2012	5:29:57 PM	SiCl4 post valve closed
7/19/2012	5:29:57 PM	Bypass valve closed
7/19/2012	5:29:57 PM	Bubbler valve closed
7/19/2012	5:29:57 PM	Main Vac valve opened
7/19/2012	5:29:57 PM	Helium MFC set to  0.000000
7/19/2012	5:29:57 PM	H2 MFC set to  0.000000
7/19/2012	5:29:57 PM	BCl3 MFC set to  0.000000
7/19/2012	5:29:57 PM	PH3 MFC set to  0.000000
7/19/2012	5:29:57 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:29:57 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:29:57 PM	Tube furnace set to 0
7/19/2012	5:30:27 PM	H2 valve closed
7/19/2012	5:30:27 PM	BCl3 valve closed
7/19/2012	5:30:27 PM	PH3 valve closed
7/19/2012	5:30:27 PM	SiCl4 pre valve closed
7/19/2012	5:30:27 PM	SiCl4 post valve closed
7/19/2012	5:30:27 PM	Bypass valve closed
7/19/2012	5:30:27 PM	Bubbler valve closed
7/19/2012	5:30:27 PM	Helium valve opened
7/19/2012	5:30:27 PM	Main Vac valve opened
7/19/2012	5:30:27 PM	Helium MFC set to  20.000000
7/19/2012	5:30:27 PM	H2 MFC set to  0.000000
7/19/2012	5:30:27 PM	BCl3 MFC set to  0.000000
7/19/2012	5:30:27 PM	PH3 MFC set to  0.000000
7/19/2012	5:30:27 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:30:27 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:30:27 PM	Tube furnace set to 0
7/19/2012	5:30:57 PM	Helium valve closed
7/19/2012	5:30:57 PM	H2 valve closed
7/19/2012	5:30:57 PM	BCl3 valve closed
7/19/2012	5:30:57 PM	PH3 valve closed
7/19/2012	5:30:57 PM	SiCl4 pre valve closed
7/19/2012	5:30:57 PM	SiCl4 post valve closed
7/19/2012	5:30:57 PM	Bypass valve closed
7/19/2012	5:30:57 PM	Bubbler valve closed
7/19/2012	5:30:57 PM	Main Vac valve opened
7/19/2012	5:30:57 PM	Helium MFC set to  0.000000
7/19/2012	5:30:58 PM	H2 MFC set to  0.000000
7/19/2012	5:30:58 PM	BCl3 MFC set to  0.000000
7/19/2012	5:30:58 PM	PH3 MFC set to  0.000000
7/19/2012	5:30:58 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:30:58 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:30:58 PM	Tube furnace set to 0
7/19/2012	5:31:28 PM	H2 valve closed
7/19/2012	5:31:28 PM	BCl3 valve closed
7/19/2012	5:31:28 PM	PH3 valve closed
7/19/2012	5:31:28 PM	SiCl4 pre valve closed
7/19/2012	5:31:28 PM	SiCl4 post valve closed
7/19/2012	5:31:28 PM	Bypass valve closed
7/19/2012	5:31:28 PM	Bubbler valve closed
7/19/2012	5:31:28 PM	Helium valve opened
7/19/2012	5:31:28 PM	Main Vac valve opened
7/19/2012	5:31:28 PM	Helium MFC set to  20.000000
7/19/2012	5:31:28 PM	H2 MFC set to  0.000000
7/19/2012	5:31:28 PM	BCl3 MFC set to  0.000000
7/19/2012	5:31:28 PM	PH3 MFC set to  0.000000
7/19/2012	5:31:28 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:31:28 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:31:28 PM	Tube furnace set to 0
7/19/2012	5:31:58 PM	Helium valve closed
7/19/2012	5:31:58 PM	H2 valve closed
7/19/2012	5:31:58 PM	BCl3 valve closed
7/19/2012	5:31:58 PM	PH3 valve closed
7/19/2012	5:31:58 PM	SiCl4 pre valve closed
7/19/2012	5:31:58 PM	SiCl4 post valve closed
7/19/2012	5:31:58 PM	Bypass valve closed
7/19/2012	5:31:58 PM	Bubbler valve closed
7/19/2012	5:31:58 PM	Main Vac valve opened
7/19/2012	5:31:58 PM	Helium MFC set to  0.000000
7/19/2012	5:31:58 PM	H2 MFC set to  0.000000
7/19/2012	5:31:58 PM	BCl3 MFC set to  0.000000
7/19/2012	5:31:58 PM	PH3 MFC set to  0.000000
7/19/2012	5:31:58 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:31:58 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:31:58 PM	Tube furnace set to 0
7/19/2012	5:32:28 PM	H2 valve closed
7/19/2012	5:32:28 PM	BCl3 valve closed
7/19/2012	5:32:28 PM	PH3 valve closed
7/19/2012	5:32:28 PM	SiCl4 pre valve closed
7/19/2012	5:32:28 PM	SiCl4 post valve closed
7/19/2012	5:32:28 PM	Bypass valve closed
7/19/2012	5:32:28 PM	Bubbler valve closed
7/19/2012	5:32:28 PM	Helium valve opened
7/19/2012	5:32:28 PM	Main Vac valve opened
7/19/2012	5:32:28 PM	Helium MFC set to  20.000000
7/19/2012	5:32:28 PM	H2 MFC set to  0.000000
7/19/2012	5:32:28 PM	BCl3 MFC set to  0.000000
7/19/2012	5:32:28 PM	PH3 MFC set to  0.000000
7/19/2012	5:32:28 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:32:28 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:32:28 PM	Tube furnace set to 0
7/19/2012	5:32:58 PM	Helium valve closed
7/19/2012	5:32:58 PM	H2 valve closed
7/19/2012	5:32:58 PM	BCl3 valve closed
7/19/2012	5:32:58 PM	PH3 valve closed
7/19/2012	5:32:58 PM	SiCl4 pre valve closed
7/19/2012	5:32:58 PM	SiCl4 post valve closed
7/19/2012	5:32:58 PM	Bypass valve closed
7/19/2012	5:32:58 PM	Bubbler valve closed
7/19/2012	5:32:58 PM	Main Vac valve opened
7/19/2012	5:32:58 PM	Helium MFC set to  0.000000
7/19/2012	5:32:58 PM	H2 MFC set to  0.000000
7/19/2012	5:32:58 PM	BCl3 MFC set to  0.000000
7/19/2012	5:32:58 PM	PH3 MFC set to  0.000000
7/19/2012	5:32:58 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:32:58 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:32:59 PM	Tube furnace set to 0
7/19/2012	5:33:29 PM	H2 valve closed
7/19/2012	5:33:29 PM	BCl3 valve closed
7/19/2012	5:33:29 PM	PH3 valve closed
7/19/2012	5:33:29 PM	SiCl4 pre valve closed
7/19/2012	5:33:29 PM	SiCl4 post valve closed
7/19/2012	5:33:29 PM	Bypass valve closed
7/19/2012	5:33:29 PM	Bubbler valve closed
7/19/2012	5:33:29 PM	Helium valve opened
7/19/2012	5:33:29 PM	Main Vac valve opened
7/19/2012	5:33:29 PM	Helium MFC set to  20.000000
7/19/2012	5:33:29 PM	H2 MFC set to  0.000000
7/19/2012	5:33:29 PM	BCl3 MFC set to  0.000000
7/19/2012	5:33:29 PM	PH3 MFC set to  0.000000
7/19/2012	5:33:29 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:33:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:33:29 PM	Tube furnace set to 0
7/19/2012	5:33:59 PM	Helium valve closed
7/19/2012	5:33:59 PM	H2 valve closed
7/19/2012	5:33:59 PM	BCl3 valve closed
7/19/2012	5:33:59 PM	PH3 valve closed
7/19/2012	5:33:59 PM	SiCl4 pre valve closed
7/19/2012	5:33:59 PM	SiCl4 post valve closed
7/19/2012	5:33:59 PM	Bypass valve closed
7/19/2012	5:33:59 PM	Bubbler valve closed
7/19/2012	5:33:59 PM	Main Vac valve opened
7/19/2012	5:33:59 PM	Helium MFC set to  0.000000
7/19/2012	5:33:59 PM	H2 MFC set to  0.000000
7/19/2012	5:33:59 PM	BCl3 MFC set to  0.000000
7/19/2012	5:33:59 PM	PH3 MFC set to  0.000000
7/19/2012	5:33:59 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:33:59 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:33:59 PM	Tube furnace set to 0
7/19/2012	5:34:29 PM	H2 valve closed
7/19/2012	5:34:29 PM	BCl3 valve closed
7/19/2012	5:34:29 PM	PH3 valve closed
7/19/2012	5:34:29 PM	SiCl4 pre valve closed
7/19/2012	5:34:29 PM	SiCl4 post valve closed
7/19/2012	5:34:29 PM	Bypass valve closed
7/19/2012	5:34:29 PM	Bubbler valve closed
7/19/2012	5:34:29 PM	Helium valve opened
7/19/2012	5:34:29 PM	Main Vac valve opened
7/19/2012	5:34:29 PM	Helium MFC set to  20.000000
7/19/2012	5:34:29 PM	H2 MFC set to  0.000000
7/19/2012	5:34:29 PM	BCl3 MFC set to  0.000000
7/19/2012	5:34:29 PM	PH3 MFC set to  0.000000
7/19/2012	5:34:29 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:34:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:34:29 PM	Tube furnace set to 0
7/19/2012	5:34:59 PM	Helium valve closed
7/19/2012	5:34:59 PM	H2 valve closed
7/19/2012	5:34:59 PM	BCl3 valve closed
7/19/2012	5:34:59 PM	PH3 valve closed
7/19/2012	5:34:59 PM	SiCl4 pre valve closed
7/19/2012	5:34:59 PM	SiCl4 post valve closed
7/19/2012	5:34:59 PM	Bypass valve closed
7/19/2012	5:34:59 PM	Bubbler valve closed
7/19/2012	5:34:59 PM	Main Vac valve opened
7/19/2012	5:34:59 PM	Helium MFC set to  0.000000
7/19/2012	5:34:59 PM	H2 MFC set to  0.000000
7/19/2012	5:34:59 PM	BCl3 MFC set to  0.000000
7/19/2012	5:34:59 PM	PH3 MFC set to  0.000000
7/19/2012	5:34:59 PM	SiCl4 MFC set to  0.000000
7/19/2012	5:34:59 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	5:35:00 PM	Tube furnace set to 0
7/19/2012	5:35:01 PM	Run finished at 5:35 PM
7/19/2012	5:35:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2012	5:59:45 PM	Main Vac valve closed
7/19/2012	5:59:59 PM	Main Vac valve opened
7/19/2012	6:01:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2012	6:01:25 PM	Recipe started at 6:01 PM
7/19/2012	6:01:25 PM	Helium valve closed
7/19/2012	6:01:25 PM	H2 valve closed
7/19/2012	6:01:25 PM	BCl3 valve closed
7/19/2012	6:01:25 PM	PH3 valve closed
7/19/2012	6:01:25 PM	SiCl4 pre valve closed
7/19/2012	6:01:25 PM	SiCl4 post valve closed
7/19/2012	6:01:25 PM	Main Vac valve closed
7/19/2012	6:01:25 PM	Bubbler valve closed
7/19/2012	6:01:25 PM	Bypass valve opened
7/19/2012	6:01:25 PM	Helium MFC set to  0.000000
7/19/2012	6:01:25 PM	H2 MFC set to  0.000000
7/19/2012	6:01:25 PM	BCl3 MFC set to  0.000000
7/19/2012	6:01:25 PM	PH3 MFC set to  0.000000
7/19/2012	6:01:25 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:01:25 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:01:25 PM	Tube furnace set to 0
7/19/2012	6:01:26 PM	Helium valve closed
7/19/2012	6:01:26 PM	H2 valve closed
7/19/2012	6:01:26 PM	BCl3 valve closed
7/19/2012	6:01:26 PM	PH3 valve closed
7/19/2012	6:01:26 PM	SiCl4 pre valve closed
7/19/2012	6:01:26 PM	SiCl4 post valve closed
7/19/2012	6:01:26 PM	Main Vac valve closed
7/19/2012	6:01:26 PM	Bubbler valve closed
7/19/2012	6:01:26 PM	Bypass valve opened
7/19/2012	6:01:26 PM	Helium MFC set to  0.000000
7/19/2012	6:01:26 PM	H2 MFC set to  0.000000
7/19/2012	6:01:26 PM	BCl3 MFC set to  0.000000
7/19/2012	6:01:26 PM	PH3 MFC set to  0.000000
7/19/2012	6:01:26 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:01:26 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:01:26 PM	Tube furnace set to 0
7/19/2012	6:01:56 PM	Helium valve closed
7/19/2012	6:01:56 PM	H2 valve closed
7/19/2012	6:01:56 PM	BCl3 valve closed
7/19/2012	6:01:56 PM	PH3 valve closed
7/19/2012	6:01:56 PM	SiCl4 pre valve closed
7/19/2012	6:01:56 PM	SiCl4 post valve closed
7/19/2012	6:01:56 PM	Bypass valve closed
7/19/2012	6:01:56 PM	Bubbler valve closed
7/19/2012	6:01:56 PM	Main Vac valve opened
7/19/2012	6:01:56 PM	Helium MFC set to  0.000000
7/19/2012	6:01:56 PM	H2 MFC set to  0.000000
7/19/2012	6:01:56 PM	BCl3 MFC set to  0.000000
7/19/2012	6:01:56 PM	PH3 MFC set to  0.000000
7/19/2012	6:01:56 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:01:56 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:01:56 PM	Tube furnace set to 0
7/19/2012	6:02:26 PM	H2 valve closed
7/19/2012	6:02:26 PM	BCl3 valve closed
7/19/2012	6:02:26 PM	PH3 valve closed
7/19/2012	6:02:26 PM	SiCl4 pre valve closed
7/19/2012	6:02:26 PM	SiCl4 post valve closed
7/19/2012	6:02:26 PM	Bypass valve closed
7/19/2012	6:02:26 PM	Bubbler valve closed
7/19/2012	6:02:26 PM	Helium valve opened
7/19/2012	6:02:26 PM	Main Vac valve opened
7/19/2012	6:02:26 PM	Helium MFC set to  20.000000
7/19/2012	6:02:26 PM	H2 MFC set to  0.000000
7/19/2012	6:02:26 PM	BCl3 MFC set to  0.000000
7/19/2012	6:02:26 PM	PH3 MFC set to  0.000000
7/19/2012	6:02:26 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:02:26 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:02:26 PM	Tube furnace set to 0
7/19/2012	6:02:56 PM	Helium valve closed
7/19/2012	6:02:56 PM	H2 valve closed
7/19/2012	6:02:56 PM	BCl3 valve closed
7/19/2012	6:02:56 PM	PH3 valve closed
7/19/2012	6:02:56 PM	SiCl4 pre valve closed
7/19/2012	6:02:56 PM	SiCl4 post valve closed
7/19/2012	6:02:56 PM	Bypass valve closed
7/19/2012	6:02:56 PM	Bubbler valve closed
7/19/2012	6:02:56 PM	Main Vac valve opened
7/19/2012	6:02:56 PM	Helium MFC set to  0.000000
7/19/2012	6:02:56 PM	H2 MFC set to  0.000000
7/19/2012	6:02:56 PM	BCl3 MFC set to  0.000000
7/19/2012	6:02:56 PM	PH3 MFC set to  0.000000
7/19/2012	6:02:56 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:02:56 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:02:57 PM	Tube furnace set to 0
7/19/2012	6:03:27 PM	H2 valve closed
7/19/2012	6:03:27 PM	BCl3 valve closed
7/19/2012	6:03:27 PM	PH3 valve closed
7/19/2012	6:03:27 PM	SiCl4 pre valve closed
7/19/2012	6:03:27 PM	SiCl4 post valve closed
7/19/2012	6:03:27 PM	Bypass valve closed
7/19/2012	6:03:27 PM	Bubbler valve closed
7/19/2012	6:03:27 PM	Helium valve opened
7/19/2012	6:03:27 PM	Main Vac valve opened
7/19/2012	6:03:27 PM	Helium MFC set to  20.000000
7/19/2012	6:03:27 PM	H2 MFC set to  0.000000
7/19/2012	6:03:27 PM	BCl3 MFC set to  0.000000
7/19/2012	6:03:27 PM	PH3 MFC set to  0.000000
7/19/2012	6:03:27 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:03:27 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:03:27 PM	Tube furnace set to 0
7/19/2012	6:03:57 PM	Helium valve closed
7/19/2012	6:03:57 PM	H2 valve closed
7/19/2012	6:03:57 PM	BCl3 valve closed
7/19/2012	6:03:57 PM	PH3 valve closed
7/19/2012	6:03:57 PM	SiCl4 pre valve closed
7/19/2012	6:03:57 PM	SiCl4 post valve closed
7/19/2012	6:03:57 PM	Bypass valve closed
7/19/2012	6:03:57 PM	Bubbler valve closed
7/19/2012	6:03:57 PM	Main Vac valve opened
7/19/2012	6:03:57 PM	Helium MFC set to  0.000000
7/19/2012	6:03:57 PM	H2 MFC set to  0.000000
7/19/2012	6:03:57 PM	BCl3 MFC set to  0.000000
7/19/2012	6:03:57 PM	PH3 MFC set to  0.000000
7/19/2012	6:03:57 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:03:57 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:03:57 PM	Tube furnace set to 0
7/19/2012	6:04:27 PM	H2 valve closed
7/19/2012	6:04:27 PM	BCl3 valve closed
7/19/2012	6:04:27 PM	PH3 valve closed
7/19/2012	6:04:27 PM	SiCl4 pre valve closed
7/19/2012	6:04:27 PM	SiCl4 post valve closed
7/19/2012	6:04:27 PM	Bypass valve closed
7/19/2012	6:04:27 PM	Bubbler valve closed
7/19/2012	6:04:27 PM	Helium valve opened
7/19/2012	6:04:27 PM	Main Vac valve opened
7/19/2012	6:04:27 PM	Helium MFC set to  20.000000
7/19/2012	6:04:27 PM	H2 MFC set to  0.000000
7/19/2012	6:04:27 PM	BCl3 MFC set to  0.000000
7/19/2012	6:04:27 PM	PH3 MFC set to  0.000000
7/19/2012	6:04:27 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:04:27 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:04:27 PM	Tube furnace set to 0
7/19/2012	6:04:57 PM	Helium valve closed
7/19/2012	6:04:57 PM	H2 valve closed
7/19/2012	6:04:57 PM	BCl3 valve closed
7/19/2012	6:04:57 PM	PH3 valve closed
7/19/2012	6:04:57 PM	SiCl4 pre valve closed
7/19/2012	6:04:57 PM	SiCl4 post valve closed
7/19/2012	6:04:57 PM	Bypass valve closed
7/19/2012	6:04:57 PM	Bubbler valve closed
7/19/2012	6:04:57 PM	Main Vac valve opened
7/19/2012	6:04:57 PM	Helium MFC set to  0.000000
7/19/2012	6:04:57 PM	H2 MFC set to  0.000000
7/19/2012	6:04:57 PM	BCl3 MFC set to  0.000000
7/19/2012	6:04:57 PM	PH3 MFC set to  0.000000
7/19/2012	6:04:57 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:04:57 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:04:57 PM	Tube furnace set to 0
7/19/2012	6:05:28 PM	H2 valve closed
7/19/2012	6:05:28 PM	BCl3 valve closed
7/19/2012	6:05:28 PM	PH3 valve closed
7/19/2012	6:05:28 PM	SiCl4 pre valve closed
7/19/2012	6:05:28 PM	SiCl4 post valve closed
7/19/2012	6:05:28 PM	Bypass valve closed
7/19/2012	6:05:28 PM	Bubbler valve closed
7/19/2012	6:05:28 PM	Helium valve opened
7/19/2012	6:05:28 PM	Main Vac valve opened
7/19/2012	6:05:28 PM	Helium MFC set to  20.000000
7/19/2012	6:05:28 PM	H2 MFC set to  0.000000
7/19/2012	6:05:28 PM	BCl3 MFC set to  0.000000
7/19/2012	6:05:28 PM	PH3 MFC set to  0.000000
7/19/2012	6:05:28 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:05:28 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:05:28 PM	Tube furnace set to 0
7/19/2012	6:05:58 PM	Helium valve closed
7/19/2012	6:05:58 PM	H2 valve closed
7/19/2012	6:05:58 PM	BCl3 valve closed
7/19/2012	6:05:58 PM	PH3 valve closed
7/19/2012	6:05:58 PM	SiCl4 pre valve closed
7/19/2012	6:05:58 PM	SiCl4 post valve closed
7/19/2012	6:05:58 PM	Bypass valve closed
7/19/2012	6:05:58 PM	Bubbler valve closed
7/19/2012	6:05:58 PM	Main Vac valve opened
7/19/2012	6:05:58 PM	Helium MFC set to  0.000000
7/19/2012	6:05:58 PM	H2 MFC set to  0.000000
7/19/2012	6:05:58 PM	BCl3 MFC set to  0.000000
7/19/2012	6:05:58 PM	PH3 MFC set to  0.000000
7/19/2012	6:05:58 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:05:58 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:05:58 PM	Tube furnace set to 0
7/19/2012	6:06:28 PM	H2 valve closed
7/19/2012	6:06:28 PM	BCl3 valve closed
7/19/2012	6:06:28 PM	PH3 valve closed
7/19/2012	6:06:28 PM	SiCl4 pre valve closed
7/19/2012	6:06:28 PM	SiCl4 post valve closed
7/19/2012	6:06:28 PM	Bypass valve closed
7/19/2012	6:06:28 PM	Bubbler valve closed
7/19/2012	6:06:28 PM	Helium valve opened
7/19/2012	6:06:28 PM	Main Vac valve opened
7/19/2012	6:06:28 PM	Helium MFC set to  20.000000
7/19/2012	6:06:28 PM	H2 MFC set to  0.000000
7/19/2012	6:06:28 PM	BCl3 MFC set to  0.000000
7/19/2012	6:06:28 PM	PH3 MFC set to  0.000000
7/19/2012	6:06:28 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:06:28 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:06:28 PM	Tube furnace set to 0
7/19/2012	6:06:58 PM	Helium valve closed
7/19/2012	6:06:58 PM	H2 valve closed
7/19/2012	6:06:58 PM	BCl3 valve closed
7/19/2012	6:06:58 PM	PH3 valve closed
7/19/2012	6:06:58 PM	SiCl4 pre valve closed
7/19/2012	6:06:58 PM	SiCl4 post valve closed
7/19/2012	6:06:58 PM	Bypass valve closed
7/19/2012	6:06:58 PM	Bubbler valve closed
7/19/2012	6:06:58 PM	Main Vac valve opened
7/19/2012	6:06:58 PM	Helium MFC set to  0.000000
7/19/2012	6:06:58 PM	H2 MFC set to  0.000000
7/19/2012	6:06:58 PM	BCl3 MFC set to  0.000000
7/19/2012	6:06:58 PM	PH3 MFC set to  0.000000
7/19/2012	6:06:58 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:06:58 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:06:58 PM	Tube furnace set to 0
7/19/2012	6:07:28 PM	H2 valve closed
7/19/2012	6:07:28 PM	BCl3 valve closed
7/19/2012	6:07:28 PM	PH3 valve closed
7/19/2012	6:07:28 PM	SiCl4 pre valve closed
7/19/2012	6:07:28 PM	SiCl4 post valve closed
7/19/2012	6:07:28 PM	Bypass valve closed
7/19/2012	6:07:28 PM	Bubbler valve closed
7/19/2012	6:07:29 PM	Helium valve opened
7/19/2012	6:07:29 PM	Main Vac valve opened
7/19/2012	6:07:29 PM	Helium MFC set to  20.000000
7/19/2012	6:07:29 PM	H2 MFC set to  0.000000
7/19/2012	6:07:29 PM	BCl3 MFC set to  0.000000
7/19/2012	6:07:29 PM	PH3 MFC set to  0.000000
7/19/2012	6:07:29 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:07:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:07:29 PM	Tube furnace set to 0
7/19/2012	6:07:59 PM	Helium valve closed
7/19/2012	6:07:59 PM	H2 valve closed
7/19/2012	6:07:59 PM	BCl3 valve closed
7/19/2012	6:07:59 PM	PH3 valve closed
7/19/2012	6:07:59 PM	SiCl4 pre valve closed
7/19/2012	6:07:59 PM	SiCl4 post valve closed
7/19/2012	6:07:59 PM	Bypass valve closed
7/19/2012	6:07:59 PM	Bubbler valve closed
7/19/2012	6:07:59 PM	Main Vac valve opened
7/19/2012	6:07:59 PM	Helium MFC set to  0.000000
7/19/2012	6:07:59 PM	H2 MFC set to  0.000000
7/19/2012	6:07:59 PM	BCl3 MFC set to  0.000000
7/19/2012	6:07:59 PM	PH3 MFC set to  0.000000
7/19/2012	6:07:59 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:07:59 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:07:59 PM	Tube furnace set to 0
7/19/2012	6:08:29 PM	H2 valve closed
7/19/2012	6:08:29 PM	BCl3 valve closed
7/19/2012	6:08:29 PM	PH3 valve closed
7/19/2012	6:08:29 PM	SiCl4 pre valve closed
7/19/2012	6:08:29 PM	SiCl4 post valve closed
7/19/2012	6:08:29 PM	Bypass valve closed
7/19/2012	6:08:29 PM	Bubbler valve closed
7/19/2012	6:08:29 PM	Helium valve opened
7/19/2012	6:08:29 PM	Main Vac valve opened
7/19/2012	6:08:29 PM	Helium MFC set to  20.000000
7/19/2012	6:08:29 PM	H2 MFC set to  0.000000
7/19/2012	6:08:29 PM	BCl3 MFC set to  0.000000
7/19/2012	6:08:29 PM	PH3 MFC set to  0.000000
7/19/2012	6:08:29 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:08:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:08:29 PM	Tube furnace set to 0
7/19/2012	6:08:59 PM	Helium valve closed
7/19/2012	6:08:59 PM	H2 valve closed
7/19/2012	6:08:59 PM	BCl3 valve closed
7/19/2012	6:08:59 PM	PH3 valve closed
7/19/2012	6:08:59 PM	SiCl4 pre valve closed
7/19/2012	6:08:59 PM	SiCl4 post valve closed
7/19/2012	6:08:59 PM	Bypass valve closed
7/19/2012	6:08:59 PM	Bubbler valve closed
7/19/2012	6:08:59 PM	Main Vac valve opened
7/19/2012	6:08:59 PM	Helium MFC set to  0.000000
7/19/2012	6:08:59 PM	H2 MFC set to  0.000000
7/19/2012	6:08:59 PM	BCl3 MFC set to  0.000000
7/19/2012	6:08:59 PM	PH3 MFC set to  0.000000
7/19/2012	6:08:59 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:08:59 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:08:59 PM	Tube furnace set to 0
7/19/2012	6:09:29 PM	H2 valve closed
7/19/2012	6:09:29 PM	BCl3 valve closed
7/19/2012	6:09:29 PM	PH3 valve closed
7/19/2012	6:09:29 PM	SiCl4 pre valve closed
7/19/2012	6:09:29 PM	SiCl4 post valve closed
7/19/2012	6:09:29 PM	Bypass valve closed
7/19/2012	6:09:29 PM	Bubbler valve closed
7/19/2012	6:09:29 PM	Helium valve opened
7/19/2012	6:09:29 PM	Main Vac valve opened
7/19/2012	6:09:29 PM	Helium MFC set to  20.000000
7/19/2012	6:09:29 PM	H2 MFC set to  0.000000
7/19/2012	6:09:29 PM	BCl3 MFC set to  0.000000
7/19/2012	6:09:29 PM	PH3 MFC set to  0.000000
7/19/2012	6:09:29 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:09:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:09:30 PM	Tube furnace set to 0
7/19/2012	6:10:00 PM	Helium valve closed
7/19/2012	6:10:00 PM	H2 valve closed
7/19/2012	6:10:00 PM	BCl3 valve closed
7/19/2012	6:10:00 PM	PH3 valve closed
7/19/2012	6:10:00 PM	SiCl4 pre valve closed
7/19/2012	6:10:00 PM	SiCl4 post valve closed
7/19/2012	6:10:00 PM	Bypass valve closed
7/19/2012	6:10:00 PM	Bubbler valve closed
7/19/2012	6:10:00 PM	Main Vac valve opened
7/19/2012	6:10:00 PM	Helium MFC set to  0.000000
7/19/2012	6:10:00 PM	H2 MFC set to  0.000000
7/19/2012	6:10:00 PM	BCl3 MFC set to  0.000000
7/19/2012	6:10:00 PM	PH3 MFC set to  0.000000
7/19/2012	6:10:00 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:10:00 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:10:00 PM	Tube furnace set to 0
7/19/2012	6:10:30 PM	H2 valve closed
7/19/2012	6:10:30 PM	BCl3 valve closed
7/19/2012	6:10:30 PM	PH3 valve closed
7/19/2012	6:10:30 PM	SiCl4 pre valve closed
7/19/2012	6:10:30 PM	SiCl4 post valve closed
7/19/2012	6:10:30 PM	Bypass valve closed
7/19/2012	6:10:30 PM	Bubbler valve closed
7/19/2012	6:10:30 PM	Helium valve opened
7/19/2012	6:10:30 PM	Main Vac valve opened
7/19/2012	6:10:30 PM	Helium MFC set to  20.000000
7/19/2012	6:10:30 PM	H2 MFC set to  0.000000
7/19/2012	6:10:30 PM	BCl3 MFC set to  0.000000
7/19/2012	6:10:30 PM	PH3 MFC set to  0.000000
7/19/2012	6:10:30 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:10:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:10:30 PM	Tube furnace set to 0
7/19/2012	6:11:00 PM	Helium valve closed
7/19/2012	6:11:00 PM	H2 valve closed
7/19/2012	6:11:00 PM	BCl3 valve closed
7/19/2012	6:11:00 PM	PH3 valve closed
7/19/2012	6:11:00 PM	SiCl4 pre valve closed
7/19/2012	6:11:00 PM	SiCl4 post valve closed
7/19/2012	6:11:00 PM	Bypass valve closed
7/19/2012	6:11:00 PM	Bubbler valve closed
7/19/2012	6:11:00 PM	Main Vac valve opened
7/19/2012	6:11:00 PM	Helium MFC set to  0.000000
7/19/2012	6:11:00 PM	H2 MFC set to  0.000000
7/19/2012	6:11:00 PM	BCl3 MFC set to  0.000000
7/19/2012	6:11:00 PM	PH3 MFC set to  0.000000
7/19/2012	6:11:00 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:11:00 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:11:00 PM	Tube furnace set to 0
7/19/2012	6:11:30 PM	H2 valve closed
7/19/2012	6:11:30 PM	BCl3 valve closed
7/19/2012	6:11:30 PM	PH3 valve closed
7/19/2012	6:11:30 PM	SiCl4 pre valve closed
7/19/2012	6:11:30 PM	SiCl4 post valve closed
7/19/2012	6:11:30 PM	Bypass valve closed
7/19/2012	6:11:30 PM	Bubbler valve closed
7/19/2012	6:11:30 PM	Helium valve opened
7/19/2012	6:11:30 PM	Main Vac valve opened
7/19/2012	6:11:30 PM	Helium MFC set to  20.000000
7/19/2012	6:11:30 PM	H2 MFC set to  0.000000
7/19/2012	6:11:30 PM	BCl3 MFC set to  0.000000
7/19/2012	6:11:30 PM	PH3 MFC set to  0.000000
7/19/2012	6:11:30 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:11:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:11:31 PM	Tube furnace set to 0
7/19/2012	6:12:01 PM	Helium valve closed
7/19/2012	6:12:01 PM	H2 valve closed
7/19/2012	6:12:01 PM	BCl3 valve closed
7/19/2012	6:12:01 PM	PH3 valve closed
7/19/2012	6:12:01 PM	SiCl4 pre valve closed
7/19/2012	6:12:01 PM	SiCl4 post valve closed
7/19/2012	6:12:01 PM	Bypass valve closed
7/19/2012	6:12:01 PM	Bubbler valve closed
7/19/2012	6:12:01 PM	Main Vac valve opened
7/19/2012	6:12:01 PM	Helium MFC set to  0.000000
7/19/2012	6:12:01 PM	H2 MFC set to  0.000000
7/19/2012	6:12:01 PM	BCl3 MFC set to  0.000000
7/19/2012	6:12:01 PM	PH3 MFC set to  0.000000
7/19/2012	6:12:01 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:12:01 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:12:01 PM	Tube furnace set to 0
7/19/2012	6:12:02 PM	Run finished at 6:12 PM
7/19/2012	6:12:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2012	6:23:03 PM	Main Vac valve closed
7/19/2012	6:23:20 PM	Main Vac valve opened
7/19/2012	6:24:12 PM	Recipe started at 6:24 PM
7/19/2012	6:24:12 PM	Helium valve closed
7/19/2012	6:24:12 PM	H2 valve closed
7/19/2012	6:24:12 PM	BCl3 valve closed
7/19/2012	6:24:12 PM	PH3 valve closed
7/19/2012	6:24:12 PM	SiCl4 pre valve closed
7/19/2012	6:24:12 PM	SiCl4 post valve closed
7/19/2012	6:24:12 PM	Main Vac valve closed
7/19/2012	6:24:12 PM	Bypass valve closed
7/19/2012	6:24:12 PM	Bubbler valve closed
7/19/2012	6:24:12 PM	Helium MFC set to  0.000000
7/19/2012	6:24:12 PM	H2 MFC set to  0.000000
7/19/2012	6:24:12 PM	BCl3 MFC set to  0.000000
7/19/2012	6:24:12 PM	PH3 MFC set to  0.000000
7/19/2012	6:24:12 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:24:12 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:24:12 PM	Tube furnace set to 0
7/19/2012	6:24:15 PM	Helium valve closed
7/19/2012	6:24:15 PM	BCl3 valve closed
7/19/2012	6:24:15 PM	PH3 valve closed
7/19/2012	6:24:15 PM	SiCl4 pre valve closed
7/19/2012	6:24:15 PM	SiCl4 post valve closed
7/19/2012	6:24:15 PM	Main Vac valve closed
7/19/2012	6:24:15 PM	Bypass valve closed
7/19/2012	6:24:15 PM	Bubbler valve closed
7/19/2012	6:24:15 PM	H2 valve opened
7/19/2012	6:24:15 PM	Helium MFC set to  0.000000
7/19/2012	6:24:15 PM	H2 MFC set to  500.000000
7/19/2012	6:24:15 PM	BCl3 MFC set to  0.000000
7/19/2012	6:24:15 PM	PH3 MFC set to  0.000000
7/19/2012	6:24:15 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:24:15 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:24:15 PM	Tube furnace set to 50
7/19/2012	6:25:29 PM	Helium valve closed
7/19/2012	6:25:29 PM	BCl3 valve closed
7/19/2012	6:25:29 PM	PH3 valve closed
7/19/2012	6:25:29 PM	SiCl4 pre valve closed
7/19/2012	6:25:29 PM	SiCl4 post valve closed
7/19/2012	6:25:29 PM	Main Vac valve closed
7/19/2012	6:25:29 PM	Bypass valve closed
7/19/2012	6:25:29 PM	H2 valve opened
7/19/2012	6:25:29 PM	Bubbler valve opened
7/19/2012	6:25:29 PM	Helium MFC set to  0.000000
7/19/2012	6:25:29 PM	H2 MFC set to  500.000000
7/19/2012	6:25:29 PM	BCl3 MFC set to  0.000000
7/19/2012	6:25:29 PM	PH3 MFC set to  0.000000
7/19/2012	6:25:29 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:25:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:25:29 PM	Tube furnace set to 50
7/19/2012	6:25:30 PM	Helium valve closed
7/19/2012	6:25:30 PM	BCl3 valve closed
7/19/2012	6:25:30 PM	PH3 valve closed
7/19/2012	6:25:30 PM	SiCl4 pre valve closed
7/19/2012	6:25:30 PM	SiCl4 post valve closed
7/19/2012	6:25:30 PM	Main Vac valve closed
7/19/2012	6:25:30 PM	Bypass valve closed
7/19/2012	6:25:30 PM	H2 valve opened
7/19/2012	6:25:30 PM	Bubbler valve opened
7/19/2012	6:25:30 PM	Helium MFC set to  0.000000
7/19/2012	6:25:30 PM	H2 MFC set to  500.000000
7/19/2012	6:25:30 PM	BCl3 MFC set to  0.000000
7/19/2012	6:25:30 PM	PH3 MFC set to  0.000000
7/19/2012	6:25:30 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:25:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:25:30 PM	Tube furnace set to 1000
7/19/2012	6:45:30 PM	Helium valve closed
7/19/2012	6:45:30 PM	BCl3 valve closed
7/19/2012	6:45:30 PM	PH3 valve closed
7/19/2012	6:45:30 PM	Main Vac valve closed
7/19/2012	6:45:30 PM	Bypass valve closed
7/19/2012	6:45:30 PM	H2 valve opened
7/19/2012	6:45:30 PM	SiCl4 pre valve opened
7/19/2012	6:45:30 PM	SiCl4 post valve opened
7/19/2012	6:45:30 PM	Bubbler valve opened
7/19/2012	6:45:30 PM	Helium MFC set to  0.000000
7/19/2012	6:45:30 PM	H2 MFC set to  500.000000
7/19/2012	6:45:30 PM	BCl3 MFC set to  0.000000
7/19/2012	6:45:30 PM	PH3 MFC set to  0.000000
7/19/2012	6:45:30 PM	SiCl4 MFC set to  50.000000
7/19/2012	6:45:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:45:30 PM	Tube furnace set to 1000
7/19/2012	6:54:00 PM	Helium valve closed
7/19/2012	6:54:00 PM	BCl3 valve closed
7/19/2012	6:54:00 PM	PH3 valve closed
7/19/2012	6:54:00 PM	SiCl4 pre valve closed
7/19/2012	6:54:00 PM	SiCl4 post valve closed
7/19/2012	6:54:00 PM	Main Vac valve closed
7/19/2012	6:54:00 PM	Bypass valve closed
7/19/2012	6:54:00 PM	H2 valve opened
7/19/2012	6:54:00 PM	Bubbler valve opened
7/19/2012	6:54:00 PM	Helium MFC set to  0.000000
7/19/2012	6:54:00 PM	H2 MFC set to  500.000000
7/19/2012	6:54:00 PM	BCl3 MFC set to  0.000000
7/19/2012	6:54:00 PM	PH3 MFC set to  0.000000
7/19/2012	6:54:00 PM	SiCl4 MFC set to  0.000000
7/19/2012	6:54:00 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	6:54:00 PM	Tube furnace set to 750
7/19/2012	7:04:01 PM	H2 valve closed
7/19/2012	7:04:01 PM	BCl3 valve closed
7/19/2012	7:04:01 PM	PH3 valve closed
7/19/2012	7:04:01 PM	SiCl4 pre valve closed
7/19/2012	7:04:01 PM	SiCl4 post valve closed
7/19/2012	7:04:01 PM	Main Vac valve closed
7/19/2012	7:04:01 PM	Bypass valve closed
7/19/2012	7:04:01 PM	Helium valve opened
7/19/2012	7:04:01 PM	Bubbler valve opened
7/19/2012	7:04:01 PM	Helium MFC set to  400.000000
7/19/2012	7:04:01 PM	H2 MFC set to  0.000000
7/19/2012	7:04:01 PM	BCl3 MFC set to  0.000000
7/19/2012	7:04:01 PM	PH3 MFC set to  0.000000
7/19/2012	7:04:01 PM	SiCl4 MFC set to  0.000000
7/19/2012	7:04:01 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:04:01 PM	Tube furnace set to 0
7/19/2012	7:08:38 PM	Run aborted at 7:08 PM
7/19/2012	7:08:38 PM	Helium valve closed
7/19/2012	7:08:38 PM	H2 valve closed
7/19/2012	7:08:38 PM	BCl3 valve closed
7/19/2012	7:08:38 PM	PH3 valve closed
7/19/2012	7:08:38 PM	SiCl4 pre valve closed
7/19/2012	7:08:38 PM	SiCl4 post valve closed
7/19/2012	7:08:38 PM	Bypass valve closed
7/19/2012	7:08:38 PM	Main Vac valve closed
7/19/2012	7:08:38 PM	Bubbler valve closed
7/19/2012	7:08:38 PM	Helium MFC set to  0.000000
7/19/2012	7:08:38 PM	H2 MFC set to  0.000000
7/19/2012	7:08:38 PM	BCl3 MFC set to  0.000000
7/19/2012	7:08:38 PM	PH3 MFC set to  0.000000
7/19/2012	7:08:38 PM	SiCl4 MFC set to  0.000000
7/19/2012	7:08:38 PM	Tube furnace set to 0
7/19/2012	7:08:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2012	7:08:41 PM	Recipe started at 7:08 PM
7/19/2012	7:08:41 PM	Helium valve closed
7/19/2012	7:08:41 PM	H2 valve closed
7/19/2012	7:08:41 PM	BCl3 valve closed
7/19/2012	7:08:41 PM	PH3 valve closed
7/19/2012	7:08:41 PM	SiCl4 pre valve closed
7/19/2012	7:08:41 PM	SiCl4 post valve closed
7/19/2012	7:08:41 PM	Main Vac valve closed
7/19/2012	7:08:41 PM	Bypass valve closed
7/19/2012	7:08:41 PM	Bubbler valve closed
7/19/2012	7:08:41 PM	Helium MFC set to  0.000000
7/19/2012	7:08:41 PM	H2 MFC set to  0.000000
7/19/2012	7:08:41 PM	BCl3 MFC set to  0.000000
7/19/2012	7:08:41 PM	PH3 MFC set to  0.000000
7/19/2012	7:08:41 PM	SiCl4 MFC set to  0.000000
7/19/2012	7:08:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:08:41 PM	Tube furnace set to 0
7/19/2012	7:08:44 PM	H2 valve closed
7/19/2012	7:08:44 PM	BCl3 valve closed
7/19/2012	7:08:44 PM	PH3 valve closed
7/19/2012	7:08:44 PM	SiCl4 pre valve closed
7/19/2012	7:08:44 PM	SiCl4 post valve closed
7/19/2012	7:08:44 PM	Main Vac valve closed
7/19/2012	7:08:44 PM	Bypass valve closed
7/19/2012	7:08:44 PM	Bubbler valve closed
7/19/2012	7:08:44 PM	Helium valve opened
7/19/2012	7:08:45 PM	Helium MFC set to  500.000000
7/19/2012	7:08:45 PM	H2 MFC set to  0.000000
7/19/2012	7:08:45 PM	BCl3 MFC set to  0.000000
7/19/2012	7:08:45 PM	PH3 MFC set to  0.000000
7/19/2012	7:08:45 PM	SiCl4 MFC set to  0.000000
7/19/2012	7:08:45 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:08:45 PM	Tube furnace set to 0
7/19/2012	7:08:45 PM	Helium valve closed
7/19/2012	7:08:45 PM	H2 valve closed
7/19/2012	7:08:45 PM	BCl3 valve closed
7/19/2012	7:08:45 PM	PH3 valve closed
7/19/2012	7:08:45 PM	SiCl4 pre valve closed
7/19/2012	7:08:45 PM	SiCl4 post valve closed
7/19/2012	7:08:45 PM	Main Vac valve closed
7/19/2012	7:08:45 PM	Bypass valve closed
7/19/2012	7:08:45 PM	Bubbler valve closed
7/19/2012	7:08:45 PM	Helium MFC set to  0.000000
7/19/2012	7:08:45 PM	H2 MFC set to  0.000000
7/19/2012	7:08:45 PM	BCl3 MFC set to  0.000000
7/19/2012	7:08:45 PM	PH3 MFC set to  0.000000
7/19/2012	7:08:45 PM	SiCl4 MFC set to  0.000000
7/19/2012	7:08:45 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:08:45 PM	Tube furnace set to 0
7/19/2012	7:08:46 PM	Run finished at 7:08 PM
7/19/2012	7:08:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2012	7:14:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2012	7:14:25 PM	Recipe started at 7:14 PM
7/19/2012	7:14:25 PM	Helium valve closed
7/19/2012	7:14:25 PM	H2 valve closed
7/19/2012	7:14:25 PM	BCl3 valve closed
7/19/2012	7:14:25 PM	PH3 valve closed
7/19/2012	7:14:25 PM	SiCl4 pre valve closed
7/19/2012	7:14:25 PM	SiCl4 post valve closed
7/19/2012	7:14:25 PM	Main Vac valve closed
7/19/2012	7:14:25 PM	Bubbler valve closed
7/19/2012	7:14:25 PM	Bypass valve opened
7/19/2012	7:14:25 PM	Helium MFC set to  0.000000
7/19/2012	7:14:25 PM	H2 MFC set to  0.000000
7/19/2012	7:14:25 PM	BCl3 MFC set to  0.000000
7/19/2012	7:14:25 PM	PH3 MFC set to  0.000000
7/19/2012	7:14:25 PM	SiCl4 MFC set to  0.000000
7/19/2012	7:14:25 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:14:25 PM	Tube furnace set to 0
7/19/2012	7:15:35 PM	Helium valve closed
7/19/2012	7:15:35 PM	H2 valve closed
7/19/2012	7:15:35 PM	BCl3 valve closed
7/19/2012	7:15:35 PM	PH3 valve closed
7/19/2012	7:15:35 PM	SiCl4 pre valve closed
7/19/2012	7:15:35 PM	SiCl4 post valve closed
7/19/2012	7:15:35 PM	Main Vac valve closed
7/19/2012	7:15:35 PM	Bubbler valve closed
7/19/2012	7:15:35 PM	Bypass valve opened
7/19/2012	7:15:35 PM	Helium MFC set to  0.000000
7/19/2012	7:15:35 PM	H2 MFC set to  0.000000
7/19/2012	7:15:35 PM	BCl3 MFC set to  0.000000
7/19/2012	7:15:35 PM	PH3 MFC set to  0.000000
7/19/2012	7:15:35 PM	SiCl4 MFC set to  0.000000
7/19/2012	7:15:35 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:15:35 PM	Tube furnace set to 0
7/19/2012	7:16:35 PM	Helium valve closed
7/19/2012	7:16:35 PM	H2 valve closed
7/19/2012	7:16:35 PM	BCl3 valve closed
7/19/2012	7:16:35 PM	PH3 valve closed
7/19/2012	7:16:35 PM	SiCl4 pre valve closed
7/19/2012	7:16:35 PM	SiCl4 post valve closed
7/19/2012	7:16:35 PM	Bypass valve closed
7/19/2012	7:16:35 PM	Bubbler valve closed
7/19/2012	7:16:35 PM	Main Vac valve opened
7/19/2012	7:16:35 PM	Helium MFC set to  0.000000
7/19/2012	7:16:35 PM	H2 MFC set to  0.000000
7/19/2012	7:16:35 PM	BCl3 MFC set to  0.000000
7/19/2012	7:16:35 PM	PH3 MFC set to  0.000000
7/19/2012	7:16:35 PM	SiCl4 MFC set to  0.000000
7/19/2012	7:16:35 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	7:16:35 PM	Tube furnace set to 0
7/19/2012	7:16:36 PM	Run finished at 7:16 PM
7/19/2012	7:16:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2012	8:43:31 PM	Main Vac valve closed
7/19/2012	8:44:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2012	8:44:14 PM	Recipe started at 8:44 PM
7/19/2012	8:44:14 PM	Helium valve closed
7/19/2012	8:44:14 PM	H2 valve closed
7/19/2012	8:44:14 PM	BCl3 valve closed
7/19/2012	8:44:14 PM	PH3 valve closed
7/19/2012	8:44:14 PM	SiCl4 pre valve closed
7/19/2012	8:44:14 PM	SiCl4 post valve closed
7/19/2012	8:44:14 PM	Main Vac valve closed
7/19/2012	8:44:14 PM	Bubbler valve closed
7/19/2012	8:44:14 PM	Bypass valve opened
7/19/2012	8:44:14 PM	Helium MFC set to  0.000000
7/19/2012	8:44:14 PM	H2 MFC set to  0.000000
7/19/2012	8:44:14 PM	BCl3 MFC set to  0.000000
7/19/2012	8:44:14 PM	PH3 MFC set to  0.000000
7/19/2012	8:44:14 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:44:14 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:44:14 PM	Tube furnace set to 0
7/19/2012	8:44:15 PM	Helium valve closed
7/19/2012	8:44:15 PM	H2 valve closed
7/19/2012	8:44:15 PM	BCl3 valve closed
7/19/2012	8:44:15 PM	PH3 valve closed
7/19/2012	8:44:15 PM	SiCl4 pre valve closed
7/19/2012	8:44:15 PM	SiCl4 post valve closed
7/19/2012	8:44:15 PM	Main Vac valve closed
7/19/2012	8:44:15 PM	Bubbler valve closed
7/19/2012	8:44:15 PM	Bypass valve opened
7/19/2012	8:44:15 PM	Helium MFC set to  0.000000
7/19/2012	8:44:15 PM	H2 MFC set to  0.000000
7/19/2012	8:44:15 PM	BCl3 MFC set to  0.000000
7/19/2012	8:44:15 PM	PH3 MFC set to  0.000000
7/19/2012	8:44:15 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:44:15 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:44:15 PM	Tube furnace set to 0
7/19/2012	8:44:45 PM	Helium valve closed
7/19/2012	8:44:45 PM	H2 valve closed
7/19/2012	8:44:45 PM	BCl3 valve closed
7/19/2012	8:44:45 PM	PH3 valve closed
7/19/2012	8:44:45 PM	SiCl4 pre valve closed
7/19/2012	8:44:45 PM	SiCl4 post valve closed
7/19/2012	8:44:45 PM	Bypass valve closed
7/19/2012	8:44:45 PM	Bubbler valve closed
7/19/2012	8:44:45 PM	Main Vac valve opened
7/19/2012	8:44:45 PM	Helium MFC set to  0.000000
7/19/2012	8:44:45 PM	H2 MFC set to  0.000000
7/19/2012	8:44:45 PM	BCl3 MFC set to  0.000000
7/19/2012	8:44:45 PM	PH3 MFC set to  0.000000
7/19/2012	8:44:45 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:44:45 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:44:45 PM	Tube furnace set to 0
7/19/2012	8:45:15 PM	H2 valve closed
7/19/2012	8:45:15 PM	BCl3 valve closed
7/19/2012	8:45:15 PM	PH3 valve closed
7/19/2012	8:45:15 PM	SiCl4 pre valve closed
7/19/2012	8:45:15 PM	SiCl4 post valve closed
7/19/2012	8:45:15 PM	Bypass valve closed
7/19/2012	8:45:15 PM	Bubbler valve closed
7/19/2012	8:45:15 PM	Helium valve opened
7/19/2012	8:45:15 PM	Main Vac valve opened
7/19/2012	8:45:15 PM	Helium MFC set to  20.000000
7/19/2012	8:45:15 PM	H2 MFC set to  0.000000
7/19/2012	8:45:15 PM	BCl3 MFC set to  0.000000
7/19/2012	8:45:15 PM	PH3 MFC set to  0.000000
7/19/2012	8:45:15 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:45:15 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:45:15 PM	Tube furnace set to 0
7/19/2012	8:45:45 PM	Helium valve closed
7/19/2012	8:45:45 PM	H2 valve closed
7/19/2012	8:45:45 PM	BCl3 valve closed
7/19/2012	8:45:45 PM	PH3 valve closed
7/19/2012	8:45:45 PM	SiCl4 pre valve closed
7/19/2012	8:45:45 PM	SiCl4 post valve closed
7/19/2012	8:45:45 PM	Bypass valve closed
7/19/2012	8:45:45 PM	Bubbler valve closed
7/19/2012	8:45:45 PM	Main Vac valve opened
7/19/2012	8:45:45 PM	Helium MFC set to  0.000000
7/19/2012	8:45:45 PM	H2 MFC set to  0.000000
7/19/2012	8:45:45 PM	BCl3 MFC set to  0.000000
7/19/2012	8:45:45 PM	PH3 MFC set to  0.000000
7/19/2012	8:45:45 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:45:45 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:45:46 PM	Tube furnace set to 0
7/19/2012	8:46:16 PM	H2 valve closed
7/19/2012	8:46:16 PM	BCl3 valve closed
7/19/2012	8:46:16 PM	PH3 valve closed
7/19/2012	8:46:16 PM	SiCl4 pre valve closed
7/19/2012	8:46:16 PM	SiCl4 post valve closed
7/19/2012	8:46:16 PM	Bypass valve closed
7/19/2012	8:46:16 PM	Bubbler valve closed
7/19/2012	8:46:16 PM	Helium valve opened
7/19/2012	8:46:16 PM	Main Vac valve opened
7/19/2012	8:46:16 PM	Helium MFC set to  20.000000
7/19/2012	8:46:16 PM	H2 MFC set to  0.000000
7/19/2012	8:46:16 PM	BCl3 MFC set to  0.000000
7/19/2012	8:46:16 PM	PH3 MFC set to  0.000000
7/19/2012	8:46:16 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:46:16 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:46:16 PM	Tube furnace set to 0
7/19/2012	8:46:46 PM	Helium valve closed
7/19/2012	8:46:46 PM	H2 valve closed
7/19/2012	8:46:46 PM	BCl3 valve closed
7/19/2012	8:46:46 PM	PH3 valve closed
7/19/2012	8:46:46 PM	SiCl4 pre valve closed
7/19/2012	8:46:46 PM	SiCl4 post valve closed
7/19/2012	8:46:46 PM	Bypass valve closed
7/19/2012	8:46:46 PM	Bubbler valve closed
7/19/2012	8:46:46 PM	Main Vac valve opened
7/19/2012	8:46:46 PM	Helium MFC set to  0.000000
7/19/2012	8:46:46 PM	H2 MFC set to  0.000000
7/19/2012	8:46:46 PM	BCl3 MFC set to  0.000000
7/19/2012	8:46:46 PM	PH3 MFC set to  0.000000
7/19/2012	8:46:46 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:46:46 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:46:46 PM	Tube furnace set to 0
7/19/2012	8:47:16 PM	H2 valve closed
7/19/2012	8:47:16 PM	BCl3 valve closed
7/19/2012	8:47:16 PM	PH3 valve closed
7/19/2012	8:47:16 PM	SiCl4 pre valve closed
7/19/2012	8:47:16 PM	SiCl4 post valve closed
7/19/2012	8:47:16 PM	Bypass valve closed
7/19/2012	8:47:16 PM	Bubbler valve closed
7/19/2012	8:47:16 PM	Helium valve opened
7/19/2012	8:47:16 PM	Main Vac valve opened
7/19/2012	8:47:16 PM	Helium MFC set to  20.000000
7/19/2012	8:47:16 PM	H2 MFC set to  0.000000
7/19/2012	8:47:16 PM	BCl3 MFC set to  0.000000
7/19/2012	8:47:16 PM	PH3 MFC set to  0.000000
7/19/2012	8:47:16 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:47:16 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:47:16 PM	Tube furnace set to 0
7/19/2012	8:47:46 PM	Helium valve closed
7/19/2012	8:47:46 PM	H2 valve closed
7/19/2012	8:47:46 PM	BCl3 valve closed
7/19/2012	8:47:46 PM	PH3 valve closed
7/19/2012	8:47:46 PM	SiCl4 pre valve closed
7/19/2012	8:47:46 PM	SiCl4 post valve closed
7/19/2012	8:47:46 PM	Bypass valve closed
7/19/2012	8:47:46 PM	Bubbler valve closed
7/19/2012	8:47:46 PM	Main Vac valve opened
7/19/2012	8:47:46 PM	Helium MFC set to  0.000000
7/19/2012	8:47:46 PM	H2 MFC set to  0.000000
7/19/2012	8:47:46 PM	BCl3 MFC set to  0.000000
7/19/2012	8:47:46 PM	PH3 MFC set to  0.000000
7/19/2012	8:47:46 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:47:46 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:47:47 PM	Tube furnace set to 0
7/19/2012	8:48:17 PM	H2 valve closed
7/19/2012	8:48:17 PM	BCl3 valve closed
7/19/2012	8:48:17 PM	PH3 valve closed
7/19/2012	8:48:17 PM	SiCl4 pre valve closed
7/19/2012	8:48:17 PM	SiCl4 post valve closed
7/19/2012	8:48:17 PM	Bypass valve closed
7/19/2012	8:48:17 PM	Bubbler valve closed
7/19/2012	8:48:17 PM	Helium valve opened
7/19/2012	8:48:17 PM	Main Vac valve opened
7/19/2012	8:48:17 PM	Helium MFC set to  20.000000
7/19/2012	8:48:17 PM	H2 MFC set to  0.000000
7/19/2012	8:48:17 PM	BCl3 MFC set to  0.000000
7/19/2012	8:48:17 PM	PH3 MFC set to  0.000000
7/19/2012	8:48:17 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:48:17 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:48:17 PM	Tube furnace set to 0
7/19/2012	8:48:47 PM	Helium valve closed
7/19/2012	8:48:47 PM	H2 valve closed
7/19/2012	8:48:47 PM	BCl3 valve closed
7/19/2012	8:48:47 PM	PH3 valve closed
7/19/2012	8:48:47 PM	SiCl4 pre valve closed
7/19/2012	8:48:47 PM	SiCl4 post valve closed
7/19/2012	8:48:47 PM	Bypass valve closed
7/19/2012	8:48:47 PM	Bubbler valve closed
7/19/2012	8:48:47 PM	Main Vac valve opened
7/19/2012	8:48:47 PM	Helium MFC set to  0.000000
7/19/2012	8:48:47 PM	H2 MFC set to  0.000000
7/19/2012	8:48:47 PM	BCl3 MFC set to  0.000000
7/19/2012	8:48:47 PM	PH3 MFC set to  0.000000
7/19/2012	8:48:47 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:48:47 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:48:47 PM	Tube furnace set to 0
7/19/2012	8:49:17 PM	H2 valve closed
7/19/2012	8:49:17 PM	BCl3 valve closed
7/19/2012	8:49:17 PM	PH3 valve closed
7/19/2012	8:49:17 PM	SiCl4 pre valve closed
7/19/2012	8:49:17 PM	SiCl4 post valve closed
7/19/2012	8:49:17 PM	Bypass valve closed
7/19/2012	8:49:17 PM	Bubbler valve closed
7/19/2012	8:49:17 PM	Helium valve opened
7/19/2012	8:49:17 PM	Main Vac valve opened
7/19/2012	8:49:17 PM	Helium MFC set to  20.000000
7/19/2012	8:49:17 PM	H2 MFC set to  0.000000
7/19/2012	8:49:17 PM	BCl3 MFC set to  0.000000
7/19/2012	8:49:17 PM	PH3 MFC set to  0.000000
7/19/2012	8:49:17 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:49:17 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:49:17 PM	Tube furnace set to 0
7/19/2012	8:49:47 PM	Helium valve closed
7/19/2012	8:49:47 PM	H2 valve closed
7/19/2012	8:49:47 PM	BCl3 valve closed
7/19/2012	8:49:47 PM	PH3 valve closed
7/19/2012	8:49:47 PM	SiCl4 pre valve closed
7/19/2012	8:49:47 PM	SiCl4 post valve closed
7/19/2012	8:49:47 PM	Bypass valve closed
7/19/2012	8:49:47 PM	Bubbler valve closed
7/19/2012	8:49:47 PM	Main Vac valve opened
7/19/2012	8:49:47 PM	Helium MFC set to  0.000000
7/19/2012	8:49:47 PM	H2 MFC set to  0.000000
7/19/2012	8:49:47 PM	BCl3 MFC set to  0.000000
7/19/2012	8:49:47 PM	PH3 MFC set to  0.000000
7/19/2012	8:49:47 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:49:47 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:49:48 PM	Tube furnace set to 0
7/19/2012	8:50:18 PM	H2 valve closed
7/19/2012	8:50:18 PM	BCl3 valve closed
7/19/2012	8:50:18 PM	PH3 valve closed
7/19/2012	8:50:18 PM	SiCl4 pre valve closed
7/19/2012	8:50:18 PM	SiCl4 post valve closed
7/19/2012	8:50:18 PM	Bypass valve closed
7/19/2012	8:50:18 PM	Bubbler valve closed
7/19/2012	8:50:18 PM	Helium valve opened
7/19/2012	8:50:18 PM	Main Vac valve opened
7/19/2012	8:50:18 PM	Helium MFC set to  20.000000
7/19/2012	8:50:18 PM	H2 MFC set to  0.000000
7/19/2012	8:50:18 PM	BCl3 MFC set to  0.000000
7/19/2012	8:50:18 PM	PH3 MFC set to  0.000000
7/19/2012	8:50:18 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:50:18 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:50:18 PM	Tube furnace set to 0
7/19/2012	8:50:48 PM	Helium valve closed
7/19/2012	8:50:48 PM	H2 valve closed
7/19/2012	8:50:48 PM	BCl3 valve closed
7/19/2012	8:50:48 PM	PH3 valve closed
7/19/2012	8:50:48 PM	SiCl4 pre valve closed
7/19/2012	8:50:48 PM	SiCl4 post valve closed
7/19/2012	8:50:48 PM	Bypass valve closed
7/19/2012	8:50:48 PM	Bubbler valve closed
7/19/2012	8:50:48 PM	Main Vac valve opened
7/19/2012	8:50:48 PM	Helium MFC set to  0.000000
7/19/2012	8:50:48 PM	H2 MFC set to  0.000000
7/19/2012	8:50:48 PM	BCl3 MFC set to  0.000000
7/19/2012	8:50:48 PM	PH3 MFC set to  0.000000
7/19/2012	8:50:48 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:50:48 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:50:48 PM	Tube furnace set to 0
7/19/2012	8:51:18 PM	H2 valve closed
7/19/2012	8:51:18 PM	BCl3 valve closed
7/19/2012	8:51:18 PM	PH3 valve closed
7/19/2012	8:51:18 PM	SiCl4 pre valve closed
7/19/2012	8:51:18 PM	SiCl4 post valve closed
7/19/2012	8:51:18 PM	Bypass valve closed
7/19/2012	8:51:18 PM	Bubbler valve closed
7/19/2012	8:51:18 PM	Helium valve opened
7/19/2012	8:51:18 PM	Main Vac valve opened
7/19/2012	8:51:18 PM	Helium MFC set to  20.000000
7/19/2012	8:51:18 PM	H2 MFC set to  0.000000
7/19/2012	8:51:18 PM	BCl3 MFC set to  0.000000
7/19/2012	8:51:18 PM	PH3 MFC set to  0.000000
7/19/2012	8:51:18 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:51:18 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:51:18 PM	Tube furnace set to 0
7/19/2012	8:51:48 PM	Helium valve closed
7/19/2012	8:51:48 PM	H2 valve closed
7/19/2012	8:51:48 PM	BCl3 valve closed
7/19/2012	8:51:48 PM	PH3 valve closed
7/19/2012	8:51:48 PM	SiCl4 pre valve closed
7/19/2012	8:51:48 PM	SiCl4 post valve closed
7/19/2012	8:51:48 PM	Bypass valve closed
7/19/2012	8:51:48 PM	Bubbler valve closed
7/19/2012	8:51:48 PM	Main Vac valve opened
7/19/2012	8:51:48 PM	Helium MFC set to  0.000000
7/19/2012	8:51:48 PM	H2 MFC set to  0.000000
7/19/2012	8:51:48 PM	BCl3 MFC set to  0.000000
7/19/2012	8:51:48 PM	PH3 MFC set to  0.000000
7/19/2012	8:51:48 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:51:48 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:51:48 PM	Tube furnace set to 0
7/19/2012	8:52:19 PM	H2 valve closed
7/19/2012	8:52:19 PM	BCl3 valve closed
7/19/2012	8:52:19 PM	PH3 valve closed
7/19/2012	8:52:19 PM	SiCl4 pre valve closed
7/19/2012	8:52:19 PM	SiCl4 post valve closed
7/19/2012	8:52:19 PM	Bypass valve closed
7/19/2012	8:52:19 PM	Bubbler valve closed
7/19/2012	8:52:19 PM	Helium valve opened
7/19/2012	8:52:19 PM	Main Vac valve opened
7/19/2012	8:52:19 PM	Helium MFC set to  20.000000
7/19/2012	8:52:19 PM	H2 MFC set to  0.000000
7/19/2012	8:52:19 PM	BCl3 MFC set to  0.000000
7/19/2012	8:52:19 PM	PH3 MFC set to  0.000000
7/19/2012	8:52:19 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:52:19 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:52:19 PM	Tube furnace set to 0
7/19/2012	8:52:49 PM	Helium valve closed
7/19/2012	8:52:49 PM	H2 valve closed
7/19/2012	8:52:49 PM	BCl3 valve closed
7/19/2012	8:52:49 PM	PH3 valve closed
7/19/2012	8:52:49 PM	SiCl4 pre valve closed
7/19/2012	8:52:49 PM	SiCl4 post valve closed
7/19/2012	8:52:49 PM	Bypass valve closed
7/19/2012	8:52:49 PM	Bubbler valve closed
7/19/2012	8:52:49 PM	Main Vac valve opened
7/19/2012	8:52:49 PM	Helium MFC set to  0.000000
7/19/2012	8:52:49 PM	H2 MFC set to  0.000000
7/19/2012	8:52:49 PM	BCl3 MFC set to  0.000000
7/19/2012	8:52:49 PM	PH3 MFC set to  0.000000
7/19/2012	8:52:49 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:52:49 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:52:49 PM	Tube furnace set to 0
7/19/2012	8:53:19 PM	H2 valve closed
7/19/2012	8:53:19 PM	BCl3 valve closed
7/19/2012	8:53:19 PM	PH3 valve closed
7/19/2012	8:53:19 PM	SiCl4 pre valve closed
7/19/2012	8:53:19 PM	SiCl4 post valve closed
7/19/2012	8:53:19 PM	Bypass valve closed
7/19/2012	8:53:19 PM	Bubbler valve closed
7/19/2012	8:53:19 PM	Helium valve opened
7/19/2012	8:53:19 PM	Main Vac valve opened
7/19/2012	8:53:19 PM	Helium MFC set to  20.000000
7/19/2012	8:53:19 PM	H2 MFC set to  0.000000
7/19/2012	8:53:19 PM	BCl3 MFC set to  0.000000
7/19/2012	8:53:19 PM	PH3 MFC set to  0.000000
7/19/2012	8:53:19 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:53:19 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:53:19 PM	Tube furnace set to 0
7/19/2012	8:53:49 PM	Helium valve closed
7/19/2012	8:53:49 PM	H2 valve closed
7/19/2012	8:53:49 PM	BCl3 valve closed
7/19/2012	8:53:49 PM	PH3 valve closed
7/19/2012	8:53:49 PM	SiCl4 pre valve closed
7/19/2012	8:53:49 PM	SiCl4 post valve closed
7/19/2012	8:53:49 PM	Bypass valve closed
7/19/2012	8:53:49 PM	Bubbler valve closed
7/19/2012	8:53:49 PM	Main Vac valve opened
7/19/2012	8:53:49 PM	Helium MFC set to  0.000000
7/19/2012	8:53:49 PM	H2 MFC set to  0.000000
7/19/2012	8:53:49 PM	BCl3 MFC set to  0.000000
7/19/2012	8:53:49 PM	PH3 MFC set to  0.000000
7/19/2012	8:53:49 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:53:49 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:53:49 PM	Tube furnace set to 0
7/19/2012	8:54:19 PM	H2 valve closed
7/19/2012	8:54:19 PM	BCl3 valve closed
7/19/2012	8:54:19 PM	PH3 valve closed
7/19/2012	8:54:19 PM	SiCl4 pre valve closed
7/19/2012	8:54:19 PM	SiCl4 post valve closed
7/19/2012	8:54:19 PM	Bypass valve closed
7/19/2012	8:54:19 PM	Bubbler valve closed
7/19/2012	8:54:19 PM	Helium valve opened
7/19/2012	8:54:19 PM	Main Vac valve opened
7/19/2012	8:54:19 PM	Helium MFC set to  20.000000
7/19/2012	8:54:20 PM	H2 MFC set to  0.000000
7/19/2012	8:54:20 PM	BCl3 MFC set to  0.000000
7/19/2012	8:54:20 PM	PH3 MFC set to  0.000000
7/19/2012	8:54:20 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:54:20 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:54:20 PM	Tube furnace set to 0
7/19/2012	8:54:50 PM	Helium valve closed
7/19/2012	8:54:50 PM	H2 valve closed
7/19/2012	8:54:50 PM	BCl3 valve closed
7/19/2012	8:54:50 PM	PH3 valve closed
7/19/2012	8:54:50 PM	SiCl4 pre valve closed
7/19/2012	8:54:50 PM	SiCl4 post valve closed
7/19/2012	8:54:50 PM	Bypass valve closed
7/19/2012	8:54:50 PM	Bubbler valve closed
7/19/2012	8:54:50 PM	Main Vac valve opened
7/19/2012	8:54:50 PM	Helium MFC set to  0.000000
7/19/2012	8:54:50 PM	H2 MFC set to  0.000000
7/19/2012	8:54:50 PM	BCl3 MFC set to  0.000000
7/19/2012	8:54:50 PM	PH3 MFC set to  0.000000
7/19/2012	8:54:50 PM	SiCl4 MFC set to  0.000000
7/19/2012	8:54:50 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	8:54:50 PM	Tube furnace set to 0
7/19/2012	8:54:51 PM	Run finished at 8:54 PM
7/19/2012	8:54:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/19/2012	9:00:52 PM	Main Vac valve closed
7/19/2012	9:01:08 PM	Main Vac valve opened
7/19/2012	9:01:34 PM	Recipe started at 9:01 PM
7/19/2012	9:01:34 PM	Helium valve closed
7/19/2012	9:01:34 PM	H2 valve closed
7/19/2012	9:01:34 PM	BCl3 valve closed
7/19/2012	9:01:34 PM	PH3 valve closed
7/19/2012	9:01:34 PM	SiCl4 pre valve closed
7/19/2012	9:01:34 PM	SiCl4 post valve closed
7/19/2012	9:01:34 PM	Main Vac valve closed
7/19/2012	9:01:34 PM	Bypass valve closed
7/19/2012	9:01:34 PM	Bubbler valve closed
7/19/2012	9:01:34 PM	Helium MFC set to  0.000000
7/19/2012	9:01:34 PM	H2 MFC set to  0.000000
7/19/2012	9:01:34 PM	BCl3 MFC set to  0.000000
7/19/2012	9:01:34 PM	PH3 MFC set to  0.000000
7/19/2012	9:01:34 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:01:34 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:01:35 PM	Tube furnace set to 0
7/19/2012	9:01:38 PM	Helium valve closed
7/19/2012	9:01:38 PM	BCl3 valve closed
7/19/2012	9:01:38 PM	PH3 valve closed
7/19/2012	9:01:38 PM	SiCl4 pre valve closed
7/19/2012	9:01:38 PM	SiCl4 post valve closed
7/19/2012	9:01:38 PM	Main Vac valve closed
7/19/2012	9:01:38 PM	Bypass valve closed
7/19/2012	9:01:38 PM	Bubbler valve closed
7/19/2012	9:01:38 PM	H2 valve opened
7/19/2012	9:01:38 PM	Helium MFC set to  0.000000
7/19/2012	9:01:38 PM	H2 MFC set to  500.000000
7/19/2012	9:01:38 PM	BCl3 MFC set to  0.000000
7/19/2012	9:01:38 PM	PH3 MFC set to  0.000000
7/19/2012	9:01:38 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:01:38 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:01:38 PM	Tube furnace set to 50
7/19/2012	9:02:51 PM	Helium valve closed
7/19/2012	9:02:51 PM	BCl3 valve closed
7/19/2012	9:02:51 PM	PH3 valve closed
7/19/2012	9:02:51 PM	SiCl4 pre valve closed
7/19/2012	9:02:51 PM	SiCl4 post valve closed
7/19/2012	9:02:51 PM	Main Vac valve closed
7/19/2012	9:02:51 PM	Bypass valve closed
7/19/2012	9:02:51 PM	H2 valve opened
7/19/2012	9:02:51 PM	Bubbler valve opened
7/19/2012	9:02:51 PM	Helium MFC set to  0.000000
7/19/2012	9:02:51 PM	H2 MFC set to  500.000000
7/19/2012	9:02:51 PM	BCl3 MFC set to  0.000000
7/19/2012	9:02:51 PM	PH3 MFC set to  0.000000
7/19/2012	9:02:51 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:02:51 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:02:51 PM	Tube furnace set to 50
7/19/2012	9:02:52 PM	Helium valve closed
7/19/2012	9:02:52 PM	BCl3 valve closed
7/19/2012	9:02:52 PM	PH3 valve closed
7/19/2012	9:02:52 PM	SiCl4 pre valve closed
7/19/2012	9:02:52 PM	SiCl4 post valve closed
7/19/2012	9:02:52 PM	Main Vac valve closed
7/19/2012	9:02:52 PM	Bypass valve closed
7/19/2012	9:02:52 PM	H2 valve opened
7/19/2012	9:02:52 PM	Bubbler valve opened
7/19/2012	9:02:52 PM	Helium MFC set to  0.000000
7/19/2012	9:02:52 PM	H2 MFC set to  500.000000
7/19/2012	9:02:52 PM	BCl3 MFC set to  0.000000
7/19/2012	9:02:52 PM	PH3 MFC set to  0.000000
7/19/2012	9:02:52 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:02:52 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:02:52 PM	Tube furnace set to 1000
7/19/2012	9:22:52 PM	Helium valve closed
7/19/2012	9:22:52 PM	BCl3 valve closed
7/19/2012	9:22:52 PM	PH3 valve closed
7/19/2012	9:22:52 PM	Main Vac valve closed
7/19/2012	9:22:52 PM	Bypass valve closed
7/19/2012	9:22:52 PM	H2 valve opened
7/19/2012	9:22:52 PM	SiCl4 pre valve opened
7/19/2012	9:22:52 PM	SiCl4 post valve opened
7/19/2012	9:22:52 PM	Bubbler valve opened
7/19/2012	9:22:52 PM	Helium MFC set to  0.000000
7/19/2012	9:22:52 PM	H2 MFC set to  500.000000
7/19/2012	9:22:52 PM	BCl3 MFC set to  0.000000
7/19/2012	9:22:52 PM	PH3 MFC set to  0.000000
7/19/2012	9:22:52 PM	SiCl4 MFC set to  50.000000
7/19/2012	9:22:52 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:22:52 PM	Tube furnace set to 1000
7/19/2012	9:31:22 PM	Helium valve closed
7/19/2012	9:31:22 PM	BCl3 valve closed
7/19/2012	9:31:22 PM	PH3 valve closed
7/19/2012	9:31:22 PM	SiCl4 pre valve closed
7/19/2012	9:31:22 PM	SiCl4 post valve closed
7/19/2012	9:31:22 PM	Main Vac valve closed
7/19/2012	9:31:22 PM	Bypass valve closed
7/19/2012	9:31:22 PM	H2 valve opened
7/19/2012	9:31:22 PM	Bubbler valve opened
7/19/2012	9:31:22 PM	Helium MFC set to  0.000000
7/19/2012	9:31:22 PM	H2 MFC set to  500.000000
7/19/2012	9:31:22 PM	BCl3 MFC set to  0.000000
7/19/2012	9:31:22 PM	PH3 MFC set to  0.000000
7/19/2012	9:31:22 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:31:22 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:31:23 PM	Tube furnace set to 750
7/19/2012	9:41:23 PM	H2 valve closed
7/19/2012	9:41:23 PM	BCl3 valve closed
7/19/2012	9:41:23 PM	PH3 valve closed
7/19/2012	9:41:23 PM	SiCl4 pre valve closed
7/19/2012	9:41:23 PM	SiCl4 post valve closed
7/19/2012	9:41:23 PM	Main Vac valve closed
7/19/2012	9:41:23 PM	Bypass valve closed
7/19/2012	9:41:23 PM	Helium valve opened
7/19/2012	9:41:23 PM	Bubbler valve opened
7/19/2012	9:41:23 PM	Helium MFC set to  400.000000
7/19/2012	9:41:23 PM	H2 MFC set to  0.000000
7/19/2012	9:41:23 PM	BCl3 MFC set to  0.000000
7/19/2012	9:41:23 PM	PH3 MFC set to  0.000000
7/19/2012	9:41:23 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:41:23 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:41:23 PM	Tube furnace set to 0
7/19/2012	9:45:34 PM	Run aborted at 9:45 PM
7/19/2012	9:45:34 PM	Helium valve closed
7/19/2012	9:45:34 PM	H2 valve closed
7/19/2012	9:45:34 PM	BCl3 valve closed
7/19/2012	9:45:34 PM	PH3 valve closed
7/19/2012	9:45:34 PM	SiCl4 pre valve closed
7/19/2012	9:45:34 PM	SiCl4 post valve closed
7/19/2012	9:45:34 PM	Bypass valve closed
7/19/2012	9:45:34 PM	Main Vac valve closed
7/19/2012	9:45:34 PM	Bubbler valve closed
7/19/2012	9:45:34 PM	Helium MFC set to  0.000000
7/19/2012	9:45:34 PM	H2 MFC set to  0.000000
7/19/2012	9:45:34 PM	BCl3 MFC set to  0.000000
7/19/2012	9:45:34 PM	PH3 MFC set to  0.000000
7/19/2012	9:45:34 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:45:34 PM	Tube furnace set to 0
7/19/2012	9:45:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2012	9:45:37 PM	Recipe started at 9:45 PM
7/19/2012	9:45:37 PM	Helium valve closed
7/19/2012	9:45:37 PM	H2 valve closed
7/19/2012	9:45:37 PM	BCl3 valve closed
7/19/2012	9:45:37 PM	PH3 valve closed
7/19/2012	9:45:37 PM	SiCl4 pre valve closed
7/19/2012	9:45:37 PM	SiCl4 post valve closed
7/19/2012	9:45:37 PM	Main Vac valve closed
7/19/2012	9:45:37 PM	Bypass valve closed
7/19/2012	9:45:37 PM	Bubbler valve closed
7/19/2012	9:45:37 PM	Helium MFC set to  0.000000
7/19/2012	9:45:37 PM	H2 MFC set to  0.000000
7/19/2012	9:45:37 PM	BCl3 MFC set to  0.000000
7/19/2012	9:45:37 PM	PH3 MFC set to  0.000000
7/19/2012	9:45:37 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:45:37 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:45:38 PM	Tube furnace set to 0
7/19/2012	9:45:41 PM	H2 valve closed
7/19/2012	9:45:41 PM	BCl3 valve closed
7/19/2012	9:45:41 PM	PH3 valve closed
7/19/2012	9:45:41 PM	SiCl4 pre valve closed
7/19/2012	9:45:41 PM	SiCl4 post valve closed
7/19/2012	9:45:41 PM	Main Vac valve closed
7/19/2012	9:45:41 PM	Bypass valve closed
7/19/2012	9:45:41 PM	Bubbler valve closed
7/19/2012	9:45:41 PM	Helium valve opened
7/19/2012	9:45:41 PM	Helium MFC set to  500.000000
7/19/2012	9:45:41 PM	H2 MFC set to  0.000000
7/19/2012	9:45:41 PM	BCl3 MFC set to  0.000000
7/19/2012	9:45:41 PM	PH3 MFC set to  0.000000
7/19/2012	9:45:41 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:45:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:45:41 PM	Tube furnace set to 0
7/19/2012	9:45:41 PM	Helium valve closed
7/19/2012	9:45:41 PM	H2 valve closed
7/19/2012	9:45:41 PM	BCl3 valve closed
7/19/2012	9:45:41 PM	PH3 valve closed
7/19/2012	9:45:41 PM	SiCl4 pre valve closed
7/19/2012	9:45:41 PM	SiCl4 post valve closed
7/19/2012	9:45:41 PM	Main Vac valve closed
7/19/2012	9:45:41 PM	Bypass valve closed
7/19/2012	9:45:41 PM	Bubbler valve closed
7/19/2012	9:45:41 PM	Helium MFC set to  0.000000
7/19/2012	9:45:41 PM	H2 MFC set to  0.000000
7/19/2012	9:45:41 PM	BCl3 MFC set to  0.000000
7/19/2012	9:45:41 PM	PH3 MFC set to  0.000000
7/19/2012	9:45:41 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:45:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:45:41 PM	Tube furnace set to 0
7/19/2012	9:45:42 PM	Run finished at 9:45 PM
7/19/2012	9:45:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2012	9:51:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2012	9:51:42 PM	Recipe started at 9:51 PM
7/19/2012	9:51:42 PM	Helium valve closed
7/19/2012	9:51:42 PM	H2 valve closed
7/19/2012	9:51:42 PM	BCl3 valve closed
7/19/2012	9:51:42 PM	PH3 valve closed
7/19/2012	9:51:42 PM	SiCl4 pre valve closed
7/19/2012	9:51:42 PM	SiCl4 post valve closed
7/19/2012	9:51:42 PM	Main Vac valve closed
7/19/2012	9:51:42 PM	Bubbler valve closed
7/19/2012	9:51:42 PM	Bypass valve opened
7/19/2012	9:51:42 PM	Helium MFC set to  0.000000
7/19/2012	9:51:42 PM	H2 MFC set to  0.000000
7/19/2012	9:51:42 PM	BCl3 MFC set to  0.000000
7/19/2012	9:51:42 PM	PH3 MFC set to  0.000000
7/19/2012	9:51:42 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:51:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:51:42 PM	Tube furnace set to 0
7/19/2012	9:52:54 PM	Helium valve closed
7/19/2012	9:52:54 PM	H2 valve closed
7/19/2012	9:52:54 PM	BCl3 valve closed
7/19/2012	9:52:54 PM	PH3 valve closed
7/19/2012	9:52:54 PM	SiCl4 pre valve closed
7/19/2012	9:52:54 PM	SiCl4 post valve closed
7/19/2012	9:52:54 PM	Main Vac valve closed
7/19/2012	9:52:54 PM	Bubbler valve closed
7/19/2012	9:52:54 PM	Bypass valve opened
7/19/2012	9:52:54 PM	Helium MFC set to  0.000000
7/19/2012	9:52:54 PM	H2 MFC set to  0.000000
7/19/2012	9:52:54 PM	BCl3 MFC set to  0.000000
7/19/2012	9:52:54 PM	PH3 MFC set to  0.000000
7/19/2012	9:52:54 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:52:54 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:52:54 PM	Tube furnace set to 0
7/19/2012	9:53:54 PM	Helium valve closed
7/19/2012	9:53:54 PM	H2 valve closed
7/19/2012	9:53:54 PM	BCl3 valve closed
7/19/2012	9:53:54 PM	PH3 valve closed
7/19/2012	9:53:54 PM	SiCl4 pre valve closed
7/19/2012	9:53:54 PM	SiCl4 post valve closed
7/19/2012	9:53:54 PM	Bypass valve closed
7/19/2012	9:53:54 PM	Bubbler valve closed
7/19/2012	9:53:54 PM	Main Vac valve opened
7/19/2012	9:53:54 PM	Helium MFC set to  0.000000
7/19/2012	9:53:54 PM	H2 MFC set to  0.000000
7/19/2012	9:53:54 PM	BCl3 MFC set to  0.000000
7/19/2012	9:53:54 PM	PH3 MFC set to  0.000000
7/19/2012	9:53:54 PM	SiCl4 MFC set to  0.000000
7/19/2012	9:53:54 PM	Bypass solenoid MFC set to  0.000000
7/19/2012	9:53:54 PM	Tube furnace set to 0
7/19/2012	9:53:55 PM	Run finished at 9:53 PM
7/19/2012	9:53:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
